Optical properties of amorphous indium zinc oxide thin films synthesized by pulsed laser deposition
•Amorphous indium zinc oxide thin films were synthesized by the pulsed laser deposition technique at room temperature.•IZO films containing 90 at% In exhibited high optical reflectivity in the mid-IR range.•Mobilities calculated from optical data closely matched those obtained from electrical data....
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| Veröffentlicht in: | Applied surface science 2014-07, Vol.306, p.52-55 |
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| creator | Craciun, V. Martin, C. Socol, G. Tanner, D. Swart, H.C. Becherescu, N. Craciun, D. |
| description | •Amorphous indium zinc oxide thin films were synthesized by the pulsed laser deposition technique at room temperature.•IZO films containing 90 at% In exhibited high optical reflectivity in the mid-IR range.•Mobilities calculated from optical data closely matched those obtained from electrical data.
The optical properties of amorphous indium zinc oxide (a-IZO) films that were grown at room temperature by the pulsed laser deposition technique with the aid of a KrF excimer laser were investigated. Two values of 0.65 and 0.90 for the In/(In+Zn) films composition were chosen since they roughly define the area in the In–Zn–O phase diagram where good transmission in the visible range together with excellent electrical properties for a-IZO films were measured. The results of the investigations indicated that the IZO films containing 90at.% In possessed excellent qualities: high transparency from 0.400 to 4μm, high reflectivity in the mid IR range together with a very low resistivity of 5×10−4Ωcm and a high mobility of 40cm2/Vs. |
| doi_str_mv | 10.1016/j.apsusc.2014.03.189 |
| format | Article |
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The optical properties of amorphous indium zinc oxide (a-IZO) films that were grown at room temperature by the pulsed laser deposition technique with the aid of a KrF excimer laser were investigated. Two values of 0.65 and 0.90 for the In/(In+Zn) films composition were chosen since they roughly define the area in the In–Zn–O phase diagram where good transmission in the visible range together with excellent electrical properties for a-IZO films were measured. The results of the investigations indicated that the IZO films containing 90at.% In possessed excellent qualities: high transparency from 0.400 to 4μm, high reflectivity in the mid IR range together with a very low resistivity of 5×10−4Ωcm and a high mobility of 40cm2/Vs.</description><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><identifier>DOI: 10.1016/j.apsusc.2014.03.189</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Amorphous transparent and conductive oxides ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Electrical properties ; Exact sciences and technology ; Indium ; Indium zinc oxide ; Infrared reflectance ; Optical properties ; Phase diagrams ; Physics ; Pulsed laser deposition ; Reflectivity ; Thin films ; Zinc oxide</subject><ispartof>Applied surface science, 2014-07, Vol.306, p.52-55</ispartof><rights>2014 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c435t-80ac8e165f7914a1c06929e695cad57d41e82aee74fbdc62d9e4edf69b56fc9f3</citedby><cites>FETCH-LOGICAL-c435t-80ac8e165f7914a1c06929e695cad57d41e82aee74fbdc62d9e4edf69b56fc9f3</cites><orcidid>0000-0003-1940-4710</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.apsusc.2014.03.189$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,777,781,786,787,3537,23911,23912,25121,27905,27906,45976</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=28499817$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Craciun, V.</creatorcontrib><creatorcontrib>Martin, C.</creatorcontrib><creatorcontrib>Socol, G.</creatorcontrib><creatorcontrib>Tanner, D.</creatorcontrib><creatorcontrib>Swart, H.C.</creatorcontrib><creatorcontrib>Becherescu, N.</creatorcontrib><creatorcontrib>Craciun, D.</creatorcontrib><title>Optical properties of amorphous indium zinc oxide thin films synthesized by pulsed laser deposition</title><title>Applied surface science</title><description>•Amorphous indium zinc oxide thin films were synthesized by the pulsed laser deposition technique at room temperature.•IZO films containing 90 at% In exhibited high optical reflectivity in the mid-IR range.•Mobilities calculated from optical data closely matched those obtained from electrical data.
The optical properties of amorphous indium zinc oxide (a-IZO) films that were grown at room temperature by the pulsed laser deposition technique with the aid of a KrF excimer laser were investigated. Two values of 0.65 and 0.90 for the In/(In+Zn) films composition were chosen since they roughly define the area in the In–Zn–O phase diagram where good transmission in the visible range together with excellent electrical properties for a-IZO films were measured. The results of the investigations indicated that the IZO films containing 90at.% In possessed excellent qualities: high transparency from 0.400 to 4μm, high reflectivity in the mid IR range together with a very low resistivity of 5×10−4Ωcm and a high mobility of 40cm2/Vs.</description><subject>Amorphous transparent and conductive oxides</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Electrical properties</subject><subject>Exact sciences and technology</subject><subject>Indium</subject><subject>Indium zinc oxide</subject><subject>Infrared reflectance</subject><subject>Optical properties</subject><subject>Phase diagrams</subject><subject>Physics</subject><subject>Pulsed laser deposition</subject><subject>Reflectivity</subject><subject>Thin films</subject><subject>Zinc oxide</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNp9kE1r3DAQhkVpodu0_6AHXQq92JVk-UOXQglpUwjkkpyFVhqxs9iWq7FDNr--ChtyzGkG5pkZ3oexr1LUUsjux7F2C23kayWkrkVTy8G8Yzs59E3VtoN-z3YFM5VuGvWRfSI6CiFVme6Yv11W9G7kS04L5BWBeIrcTSkvh7QRxzngNvEnnD1PjxiArwececRxIk6neT0A4RMEvj_xZRupdKMjyDzAkghXTPNn9iG6MvnyUi_Y_e-ru8vr6ub2z9_LXzeV1027VoNwfgDZtbE3UjvpRWeUgc603oW2D1rCoBxAr-M--E4FAxpC7My-7aI3sblg3893S5Z_G9BqJyQP4-hmKFGs7LRSjRBKFFSfUZ8TUYZol4yTyycrhX12ao_27NQ-O7WiscVpWfv28sFRkRazmz3S664atDGD7Av388xBifuAkC15hNlDwAx-tSHh24_-A2drkbE</recordid><startdate>20140701</startdate><enddate>20140701</enddate><creator>Craciun, V.</creator><creator>Martin, C.</creator><creator>Socol, G.</creator><creator>Tanner, D.</creator><creator>Swart, H.C.</creator><creator>Becherescu, N.</creator><creator>Craciun, D.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-1940-4710</orcidid></search><sort><creationdate>20140701</creationdate><title>Optical properties of amorphous indium zinc oxide thin films synthesized by pulsed laser deposition</title><author>Craciun, V. ; Martin, C. ; Socol, G. ; Tanner, D. ; Swart, H.C. ; Becherescu, N. ; Craciun, D.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c435t-80ac8e165f7914a1c06929e695cad57d41e82aee74fbdc62d9e4edf69b56fc9f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Amorphous transparent and conductive oxides</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Electrical properties</topic><topic>Exact sciences and technology</topic><topic>Indium</topic><topic>Indium zinc oxide</topic><topic>Infrared reflectance</topic><topic>Optical properties</topic><topic>Phase diagrams</topic><topic>Physics</topic><topic>Pulsed laser deposition</topic><topic>Reflectivity</topic><topic>Thin films</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Craciun, V.</creatorcontrib><creatorcontrib>Martin, C.</creatorcontrib><creatorcontrib>Socol, G.</creatorcontrib><creatorcontrib>Tanner, D.</creatorcontrib><creatorcontrib>Swart, H.C.</creatorcontrib><creatorcontrib>Becherescu, N.</creatorcontrib><creatorcontrib>Craciun, D.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Craciun, V.</au><au>Martin, C.</au><au>Socol, G.</au><au>Tanner, D.</au><au>Swart, H.C.</au><au>Becherescu, N.</au><au>Craciun, D.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical properties of amorphous indium zinc oxide thin films synthesized by pulsed laser deposition</atitle><jtitle>Applied surface science</jtitle><date>2014-07-01</date><risdate>2014</risdate><volume>306</volume><spage>52</spage><epage>55</epage><pages>52-55</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><abstract>•Amorphous indium zinc oxide thin films were synthesized by the pulsed laser deposition technique at room temperature.•IZO films containing 90 at% In exhibited high optical reflectivity in the mid-IR range.•Mobilities calculated from optical data closely matched those obtained from electrical data.
The optical properties of amorphous indium zinc oxide (a-IZO) films that were grown at room temperature by the pulsed laser deposition technique with the aid of a KrF excimer laser were investigated. Two values of 0.65 and 0.90 for the In/(In+Zn) films composition were chosen since they roughly define the area in the In–Zn–O phase diagram where good transmission in the visible range together with excellent electrical properties for a-IZO films were measured. The results of the investigations indicated that the IZO films containing 90at.% In possessed excellent qualities: high transparency from 0.400 to 4μm, high reflectivity in the mid IR range together with a very low resistivity of 5×10−4Ωcm and a high mobility of 40cm2/Vs.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2014.03.189</doi><tpages>4</tpages><orcidid>https://orcid.org/0000-0003-1940-4710</orcidid></addata></record> |
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| subjects | Amorphous transparent and conductive oxides Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Electrical properties Exact sciences and technology Indium Indium zinc oxide Infrared reflectance Optical properties Phase diagrams Physics Pulsed laser deposition Reflectivity Thin films Zinc oxide |
| title | Optical properties of amorphous indium zinc oxide thin films synthesized by pulsed laser deposition |
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