Influences of preparation methods on bipolar switching properties in copper nitride films

Copper nitride (CuxN) films were prepared by plasma immersion ion implantation (PIII) as well as by reactive magnetron sputtering (RMS). Based on X-ray diffraction (XRD) analysis, a semiconductive phase Cu3N could be found in the films prepared by both methods. On the other hand, a copper-rich condu...

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Veröffentlicht in:	Surface & coatings technology 2013-08, Vol.229, p.135-139
Hauptverfasser:	Zhou, Qianfei, Lu, Qian, Zhou, Yongning, Yang, Yin, Du, Xiaoqin, Zhang, Xin, Wu, Xiaojing
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Copper COPPER NITRIDE Cross-disciplinary physics: materials science rheology ELECTRICAL CONDUCTIVITY Electrodes Exact sciences and technology ION IMPLANTATION Magnetron sputtering MASS SPECTROSCOPY Materials science Metals. Metallurgy Nickel Nitrides Nonvolatile memories Other surface treatments Physics Production techniques Reactive magnetron sputtering Resistive switching Secondary ion mass spectrometry Secondary ion mass spectroscopy SPUTTERING Surface treatment Surface treatments Switching
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