A long-lifetime MoS2/a-C:H nanoscale multilayer film with extremely low internal stress

A series of MoS2/a-C:H multilayer films with different bilayer periods were deposited by medium frequency unbalanced magnetron sputtering. The morphology, microstructure, mechanical and tribological properties of the films were investigated. It was found that all the films have relatively low hardne...

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Veröffentlicht in:	Surface & coatings technology 2013-12, Vol.236, p.438-443
Hauptverfasser:	Wu, Yanxia, Li, Hongxuan, Ji, Li, Ye, Yinping, Chen, Jianmin, Zhou, Huidi
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Friction Lubrication Materials science Mechanical properties Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy Microstructure Molybdenum disulfide MoS2/a-C:H multilayer film Multilayers Nanostructure Physics Residual stress Sliding Surface treatments Tribological properties Tribology
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