Applications of Hadamard transform-gas chromatography/mass spectrometry for the detection of hexamethyldisiloxane in a wafer cleanroom

The Hadamard transform-gas chromatography/mass spectrometry (HT-GC/MS) technique was successfully employed for the detection of hexamethyldisiloxane (HMDSO, C 6H 18OSi 2) at the sub-nL/L level in a semiconductor wafer cleanroom. Indoor air samples were collected from the room, according to EPA Metho...

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Veröffentlicht in:	Journal of Chromatography A 2012-01, Vol.1220 (13), p.143-146
Hauptverfasser:	Cheng, Yuan-Kai, Lin, Cheng-Huang, Kuo, Samuel, Yang, Jonathan, Hsiung, Szu-Yuan, Wang, Jia-Lin
Format:	Artikel
Sprache:	eng
Schlagworte:	absorption air Air - analysis Algorithms AMC (airborne molecular contaminant) Chromatography Cleanroom Cleanrooms Environment, Controlled Environmental Monitoring - methods Fourier Analysis gas chromatography Gas Chromatography-Mass Spectrometry - instrumentation Gas Chromatography-Mass Spectrometry - methods Gas chromatography/mass spectrometry Hadamard transform Hexamethyldisiloxane HMDS HMDSO Inverse Mass spectrometry Semiconductors Signal to noise ratio Siloxanes - analysis Wafers
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