Raman analysis of DLC and Si-DLC films deposited on nitrile rubber

In this study a hybrid diamond-like carbon (DLC) and silicon doped diamond-like carbon (Si-DLC), with and without Si–C interlayers, were deposited onto nitrile rubber substrates. The deposition was done in a closed field unbalanced magnetron sputtering ion plating (CFUBMSIP) rig in Ar/C4H10 plasma....

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Veröffentlicht in:Surface & coatings technology 2013-10, Vol.232, p.521-527
Hauptverfasser: Lubwama, M., Corcoran, B., Rajani, K.V., Wong, C.S., Kirabira, J.B., Sebbit, A., McDonnell, K.A., Dowling, D., Sayers, K.
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container_end_page 527
container_issue
container_start_page 521
container_title Surface & coatings technology
container_volume 232
creator Lubwama, M.
Corcoran, B.
Rajani, K.V.
Wong, C.S.
Kirabira, J.B.
Sebbit, A.
McDonnell, K.A.
Dowling, D.
Sayers, K.
description In this study a hybrid diamond-like carbon (DLC) and silicon doped diamond-like carbon (Si-DLC), with and without Si–C interlayers, were deposited onto nitrile rubber substrates. The deposition was done in a closed field unbalanced magnetron sputtering ion plating (CFUBMSIP) rig in Ar/C4H10 plasma. A combination of visible (488nm) and ultra-violet (UV; 325nm) Raman analysis was used to determine the G-peak dispersion of the films. Raman analysis was also used to estimate the hydrogen concentration and residual stress in the films. Calculated hydrogen values for all of the films were between 26 and 31%. The residual stress estimates of the films indicated that the inclusion of Si dopant and Si–C interlayers reduced compressive stress in these films. Raman analysis of the wear tracks indicated an increase in the G-peak position which could indicate that graphitization occurred during pin-on-disc experiments. •DLC and Si-DLC films were deposited onto nitrile rubber.•G-peak dispersion was determined using multi-wavelength Raman spectroscopy.•DLC film with Si–C interlayer has more sp2 clustering.•Calculated hydrogen values for all of the films were between 26 and 31%.•Graphitization processes occurred during pin-on-disc experiments.
doi_str_mv 10.1016/j.surfcoat.2013.06.013
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subjects Cross-disciplinary physics: materials science
rheology
Deposition
Diamond-like carbon films
DLC
Estimates
Exact sciences and technology
G peak dispersion
Interlayers
Magnetron sputtering
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Nitrile rubber
Physics
Raman spectroscopy
Residual stress
Si-DLC
Silicon substrates
Surface treatments
Tauc gap
title Raman analysis of DLC and Si-DLC films deposited on nitrile rubber
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