Design of a novel passive flexure-based mechanism for microelectromechanical system optical switch assembly

In microelectromechanical system (MEMS) optical switch assembly, the collision always exists between the optical fiber and the edges of the U-groove due to the positioning errors between them. It will cause the irreparable damage since the optical fiber and the silicon-made U-groove are usually very...

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Veröffentlicht in:	Review of scientific instruments 2014-12, Vol.85 (12), p.125113-125113
Hauptverfasser:	Zhang, Jianbin, Sun, Xiantao, Chen, Weihai, Chen, Wenjie, Jiang, Lusha
Format:	Artikel
Sprache:	eng
Schlagworte:	Assembly Finite element method Flexing Insertion Machine vision Microelectromechanical systems Optical fibers Optical switching Performance tests Positioning devices (machinery) Scientific apparatus & instruments Stiffness
Online-Zugang:	Volltext
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