Ozone detection using low-power-consumption metal–oxide gas sensors

Thin films of RGTO–SnO 2 deposited onto micromachined heater elements were characterised for their sensitivity towards prominent air pollutants such as O 3, NO 2, NO and CO. We find that, unlike their thick-film counterparts, thin-film SnO 2 sensors exhibit a very high sensitivity towards oxidising...

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Veröffentlicht in:	Sensors and actuators. A, Physical Physical, 1999-04, Vol.74 (1), p.229-232
Hauptverfasser:	Becker, Th, Tomasi, L, Bosch-v.Braunmühl, Chr, Müller, G, Sberveglieri, G, Fagli, G, Comini, E
Format:	Artikel
Sprache:	eng
Schlagworte:	Air pollution monitoring Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology General equipment and techniques Global environmental pollution Instruments for environmental pollution measurements Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated circuits Metal–oxide sensing layers Microelectronics: LSI, VLSI, ULSI integrated circuit fabrication technology Ozone sensing Physics Pollution Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Thin and thick film gas sensors
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