Ozone detection using low-power-consumption metal–oxide gas sensors
Thin films of RGTO–SnO 2 deposited onto micromachined heater elements were characterised for their sensitivity towards prominent air pollutants such as O 3, NO 2, NO and CO. We find that, unlike their thick-film counterparts, thin-film SnO 2 sensors exhibit a very high sensitivity towards oxidising...
Gespeichert in:
| Veröffentlicht in: | Sensors and actuators. A, Physical Physical, 1999-04, Vol.74 (1), p.229-232 |
|---|---|
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 232 |
|---|---|
| container_issue | 1 |
| container_start_page | 229 |
| container_title | Sensors and actuators. A, Physical |
| container_volume | 74 |
| creator | Becker, Th Tomasi, L Bosch-v.Braunmühl, Chr Müller, G Sberveglieri, G Fagli, G Comini, E |
| description | Thin films of RGTO–SnO
2 deposited onto micromachined heater elements were characterised for their sensitivity towards prominent air pollutants such as O
3, NO
2, NO and CO. We find that, unlike their thick-film counterparts, thin-film SnO
2 sensors exhibit a very high sensitivity towards oxidising gases such as NO
2, and in particular O
3. Sensitivities towards reducing species such as CO and NO are less pronounced than in thick-film sensors and in the nature of small cross-sensitivities on the main sensitivity to ozone. The differences between thin and thick-film devices are discussed, and it is shown that thin-film devices on micromachined heater elements hold promise for fabricating low-power-consumption gas sensors capable of detecting environmentally relevant concentrations of ozone. |
| doi_str_mv | 10.1016/S0924-4247(98)00301-X |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_16132511</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S092442479800301X</els_id><sourcerecordid>16132511</sourcerecordid><originalsourceid>FETCH-LOGICAL-c433t-ed461ec614c5ff8468926cb3ea59d04e14a6a868cc20f43a2a46d7708bd143143</originalsourceid><addsrcrecordid>eNqFkM1KxDAQx4MouK4-gtCDiB6qSZOm6UlkWT9gYQ8q7C1k0-kS6TY103XVk-_gG_okdj_QozAwh_n9Z5gfIceMXjDK5OUDzRMRi0RkZ7k6p5RTFk92SI-pjMecynyX9H6RfXKA-Ew7imdZjwzHH76GqIAWbOt8HS3Q1bOo8su48UsIsfU1LubNejaH1lTfn1_-zRUQzQxGCDX6gIdkrzQVwtG298nTzfBxcBePxrf3g-tRbAXnbQyFkAysZMKmZamEVHki7ZSDSfOCCmDCSKOksjahpeAmMUIWWUbVtGCCd9Unp5u9TfAvC8BWzx1aqCpTg1-gZpLxJGWsA9MNaINHDFDqJri5Ce-aUb2SptfS9MqIzpVeS9OTLneyPWDQmqoMprYO_8JZpniedtjVBoPu2VcHQaN1UFsoXOg86sK7fw79AKErgkE</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>16132511</pqid></control><display><type>article</type><title>Ozone detection using low-power-consumption metal–oxide gas sensors</title><source>Elsevier ScienceDirect Journals</source><creator>Becker, Th ; Tomasi, L ; Bosch-v.Braunmühl, Chr ; Müller, G ; Sberveglieri, G ; Fagli, G ; Comini, E</creator><creatorcontrib>Becker, Th ; Tomasi, L ; Bosch-v.Braunmühl, Chr ; Müller, G ; Sberveglieri, G ; Fagli, G ; Comini, E</creatorcontrib><description>Thin films of RGTO–SnO
2 deposited onto micromachined heater elements were characterised for their sensitivity towards prominent air pollutants such as O
3, NO
2, NO and CO. We find that, unlike their thick-film counterparts, thin-film SnO
2 sensors exhibit a very high sensitivity towards oxidising gases such as NO
2, and in particular O
3. Sensitivities towards reducing species such as CO and NO are less pronounced than in thick-film sensors and in the nature of small cross-sensitivities on the main sensitivity to ozone. The differences between thin and thick-film devices are discussed, and it is shown that thin-film devices on micromachined heater elements hold promise for fabricating low-power-consumption gas sensors capable of detecting environmentally relevant concentrations of ozone.</description><identifier>ISSN: 0924-4247</identifier><identifier>EISSN: 1873-3069</identifier><identifier>DOI: 10.1016/S0924-4247(98)00301-X</identifier><language>eng</language><publisher>Lausanne: Elsevier B.V</publisher><subject>Air pollution monitoring ; Applied sciences ; Design. Technologies. Operation analysis. Testing ; Electronics ; Exact sciences and technology ; General equipment and techniques ; Global environmental pollution ; Instruments for environmental pollution measurements ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Integrated circuits ; Metal–oxide sensing layers ; Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology ; Ozone sensing ; Physics ; Pollution ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing ; Thin and thick film gas sensors</subject><ispartof>Sensors and actuators. A, Physical, 1999-04, Vol.74 (1), p.229-232</ispartof><rights>1999 Elsevier Science S.A.</rights><rights>1999 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c433t-ed461ec614c5ff8468926cb3ea59d04e14a6a868cc20f43a2a46d7708bd143143</citedby><cites>FETCH-LOGICAL-c433t-ed461ec614c5ff8468926cb3ea59d04e14a6a868cc20f43a2a46d7708bd143143</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S092442479800301X$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,776,780,785,786,3537,23909,23910,25118,27901,27902,65306</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=1778395$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Becker, Th</creatorcontrib><creatorcontrib>Tomasi, L</creatorcontrib><creatorcontrib>Bosch-v.Braunmühl, Chr</creatorcontrib><creatorcontrib>Müller, G</creatorcontrib><creatorcontrib>Sberveglieri, G</creatorcontrib><creatorcontrib>Fagli, G</creatorcontrib><creatorcontrib>Comini, E</creatorcontrib><title>Ozone detection using low-power-consumption metal–oxide gas sensors</title><title>Sensors and actuators. A, Physical</title><description>Thin films of RGTO–SnO
2 deposited onto micromachined heater elements were characterised for their sensitivity towards prominent air pollutants such as O
3, NO
2, NO and CO. We find that, unlike their thick-film counterparts, thin-film SnO
2 sensors exhibit a very high sensitivity towards oxidising gases such as NO
2, and in particular O
3. Sensitivities towards reducing species such as CO and NO are less pronounced than in thick-film sensors and in the nature of small cross-sensitivities on the main sensitivity to ozone. The differences between thin and thick-film devices are discussed, and it is shown that thin-film devices on micromachined heater elements hold promise for fabricating low-power-consumption gas sensors capable of detecting environmentally relevant concentrations of ozone.</description><subject>Air pollution monitoring</subject><subject>Applied sciences</subject><subject>Design. Technologies. Operation analysis. Testing</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>General equipment and techniques</subject><subject>Global environmental pollution</subject><subject>Instruments for environmental pollution measurements</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Integrated circuits</subject><subject>Metal–oxide sensing layers</subject><subject>Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology</subject><subject>Ozone sensing</subject><subject>Physics</subject><subject>Pollution</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</subject><subject>Thin and thick film gas sensors</subject><issn>0924-4247</issn><issn>1873-3069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1999</creationdate><recordtype>article</recordtype><recordid>eNqFkM1KxDAQx4MouK4-gtCDiB6qSZOm6UlkWT9gYQ8q7C1k0-kS6TY103XVk-_gG_okdj_QozAwh_n9Z5gfIceMXjDK5OUDzRMRi0RkZ7k6p5RTFk92SI-pjMecynyX9H6RfXKA-Ew7imdZjwzHH76GqIAWbOt8HS3Q1bOo8su48UsIsfU1LubNejaH1lTfn1_-zRUQzQxGCDX6gIdkrzQVwtG298nTzfBxcBePxrf3g-tRbAXnbQyFkAysZMKmZamEVHki7ZSDSfOCCmDCSKOksjahpeAmMUIWWUbVtGCCd9Unp5u9TfAvC8BWzx1aqCpTg1-gZpLxJGWsA9MNaINHDFDqJri5Ce-aUb2SptfS9MqIzpVeS9OTLneyPWDQmqoMprYO_8JZpniedtjVBoPu2VcHQaN1UFsoXOg86sK7fw79AKErgkE</recordid><startdate>19990420</startdate><enddate>19990420</enddate><creator>Becker, Th</creator><creator>Tomasi, L</creator><creator>Bosch-v.Braunmühl, Chr</creator><creator>Müller, G</creator><creator>Sberveglieri, G</creator><creator>Fagli, G</creator><creator>Comini, E</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7TV</scope><scope>C1K</scope></search><sort><creationdate>19990420</creationdate><title>Ozone detection using low-power-consumption metal–oxide gas sensors</title><author>Becker, Th ; Tomasi, L ; Bosch-v.Braunmühl, Chr ; Müller, G ; Sberveglieri, G ; Fagli, G ; Comini, E</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c433t-ed461ec614c5ff8468926cb3ea59d04e14a6a868cc20f43a2a46d7708bd143143</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Air pollution monitoring</topic><topic>Applied sciences</topic><topic>Design. Technologies. Operation analysis. Testing</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>General equipment and techniques</topic><topic>Global environmental pollution</topic><topic>Instruments for environmental pollution measurements</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Integrated circuits</topic><topic>Metal–oxide sensing layers</topic><topic>Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology</topic><topic>Ozone sensing</topic><topic>Physics</topic><topic>Pollution</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</topic><topic>Thin and thick film gas sensors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Becker, Th</creatorcontrib><creatorcontrib>Tomasi, L</creatorcontrib><creatorcontrib>Bosch-v.Braunmühl, Chr</creatorcontrib><creatorcontrib>Müller, G</creatorcontrib><creatorcontrib>Sberveglieri, G</creatorcontrib><creatorcontrib>Fagli, G</creatorcontrib><creatorcontrib>Comini, E</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Pollution Abstracts</collection><collection>Environmental Sciences and Pollution Management</collection><jtitle>Sensors and actuators. A, Physical</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Becker, Th</au><au>Tomasi, L</au><au>Bosch-v.Braunmühl, Chr</au><au>Müller, G</au><au>Sberveglieri, G</au><au>Fagli, G</au><au>Comini, E</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Ozone detection using low-power-consumption metal–oxide gas sensors</atitle><jtitle>Sensors and actuators. A, Physical</jtitle><date>1999-04-20</date><risdate>1999</risdate><volume>74</volume><issue>1</issue><spage>229</spage><epage>232</epage><pages>229-232</pages><issn>0924-4247</issn><eissn>1873-3069</eissn><abstract>Thin films of RGTO–SnO
2 deposited onto micromachined heater elements were characterised for their sensitivity towards prominent air pollutants such as O
3, NO
2, NO and CO. We find that, unlike their thick-film counterparts, thin-film SnO
2 sensors exhibit a very high sensitivity towards oxidising gases such as NO
2, and in particular O
3. Sensitivities towards reducing species such as CO and NO are less pronounced than in thick-film sensors and in the nature of small cross-sensitivities on the main sensitivity to ozone. The differences between thin and thick-film devices are discussed, and it is shown that thin-film devices on micromachined heater elements hold promise for fabricating low-power-consumption gas sensors capable of detecting environmentally relevant concentrations of ozone.</abstract><cop>Lausanne</cop><pub>Elsevier B.V</pub><doi>10.1016/S0924-4247(98)00301-X</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0924-4247 |
| ispartof | Sensors and actuators. A, Physical, 1999-04, Vol.74 (1), p.229-232 |
| issn | 0924-4247 1873-3069 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_16132511 |
| source | Elsevier ScienceDirect Journals |
| subjects | Air pollution monitoring Applied sciences Design. Technologies. Operation analysis. Testing Electronics Exact sciences and technology General equipment and techniques Global environmental pollution Instruments for environmental pollution measurements Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated circuits Metal–oxide sensing layers Microelectronics: LSI, VLSI, ULSI integrated circuit fabrication technology Ozone sensing Physics Pollution Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Thin and thick film gas sensors |
| title | Ozone detection using low-power-consumption metal–oxide gas sensors |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T13%3A34%3A09IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Ozone%20detection%20using%20low-power-consumption%20metal%E2%80%93oxide%20gas%20sensors&rft.jtitle=Sensors%20and%20actuators.%20A,%20Physical&rft.au=Becker,%20Th&rft.date=1999-04-20&rft.volume=74&rft.issue=1&rft.spage=229&rft.epage=232&rft.pages=229-232&rft.issn=0924-4247&rft.eissn=1873-3069&rft_id=info:doi/10.1016/S0924-4247(98)00301-X&rft_dat=%3Cproquest_cross%3E16132511%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=16132511&rft_id=info:pmid/&rft_els_id=S092442479800301X&rfr_iscdi=true |