Fabrication process of intrinsic Josephson junction stacks in Bi sub(2)Sr sub(2)CaCu sub(2)O sub(8+) sub(x) crystals by double-sided patterning process using dilute hydrochloric acid

We have developed a new double-sided patterning (DSP) process that employs dilute acid (pH = 1.65) to fabricate Bi sub(2)Sr sub(2)CaCu sub(2)O sub(8+) sub(x) (Bi-2212) stacks of intrinsic Josephson junctions. These stacks, which were fabricated from a single crystal of Bi-2212, were surrounded by an...

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Veröffentlicht in:	Cryogenics (Guildford) 2012-09, Vol.52 (7-9), p.398-402
Hauptverfasser:	Kato, Takahiro, Ishida, Hiroki, Suematsu, Hisayuki, Yasui, Kanji, Hamasaki, Katsuyoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	BISMUTH OXIDE COPPER OXIDE Crystals CUPROUS OXIDE Digital signal processing Dilution FABRICATION HYDROCHLORIC ACID Josephson junctions Patterning Reproducibility SINGLE CRYSTALS STACKS SUPERCONDUCTORS
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