Formation and disruption of conductive filaments in a HfO2 TiN structure

The process of the formation and disruption of nanometric conductive filaments in a HfO2 TiN structure is investigated by conductive atomic force microscopy. The preforming state evidences nonhomogeneous conduction at high fields through conductive paths, which are associated with pre-existing defec...

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Veröffentlicht in:	Nanotechnology 2014-09, Vol.25 (38), p.385705-385705
Hauptverfasser:	Brivio, S, Tallarida, G, Cianci, E, Spiga, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties conductive atomic force microscopy Electron, ion, and scanning probe microscopy Exact sciences and technology HfO Physics resistive switching Scanning probe microscopy: scanning tunneling, atomic force, scanning optical, magnetic force, etc Structure of solids and liquids crystallography
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