Evacuation and Vacuum Pumps

Evacuation and Vacuum Pumps

Presented here are the fundamental concepts of evacuation process and the key features of various vacuum pumps. Several essential terms, including evacuation time constant, pumping speed and conductance, are introduced to help the understanding of evacuation mechanism and to enable the design of vac...

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Veröffentlicht in:Journal of the Vacuum Society of Japan 2013, Vol.56(6), pp.210-219
Hauptverfasser: YUYAMA, Junpei, SUETSUGU, Yusuke
Format: Artikel
Sprache:jpn
Schlagworte:
Conductance
Design engineering
Evacuation
Pumping
Readers
Time constant
Vacuum pumps
Vacuum systems
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container_end_page 219
container_issue 6
container_start_page 210
container_title Journal of the Vacuum Society of Japan
container_volume 56
creator YUYAMA, Junpei
SUETSUGU, Yusuke
description Presented here are the fundamental concepts of evacuation process and the key features of various vacuum pumps. Several essential terms, including evacuation time constant, pumping speed and conductance, are introduced to help the understanding of evacuation mechanism and to enable the design of vacuum systems. The vacuum pumps are systematically classified with their operating principles, structures and characteristics. It will help readers to select the proper vacuum pumps and to realize the reasonable vacuum system in different situations.
doi_str_mv 10.3131/jvsj2.56.210
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identifier ISSN: 1882-2398
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source EZB Electronic Journals Library; J-STAGE
subjects Conductance
Design engineering
Evacuation
Pumping
Readers
Time constant
Vacuum pumps
Vacuum systems
title Evacuation and Vacuum Pumps
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