Hydrogenated amorphous silicon photonic device trimming by UV-irradiation

A method to compensate for fabrication tolerances and to fine-tune individual photonic circuit components is inevitable for wafer-scale photonic systems even with most-advanced CMOS-fabrication tools. We report a cost-effective and highly accurate method for the permanent trimming of hydrogenated am...

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Veröffentlicht in:	Optics express 2014-05, Vol.22 (10), p.12122-12132
Hauptverfasser:	Lipka, Timo, Kiepsch, Melanie, Trieu, Hoc Khiem, Müller, Jörg
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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