Improving the accuracy of walking piezo motors

Many application areas require ultraprecise, stiff, and compact actuator systems with a high positioning resolution in combination with a large range as well as a high holding and pushing force. One promising solution to meet these conflicting requirements is a walking piezo motor that works with tw...

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Bibliographische Detailangaben

Veröffentlicht in:	Review of scientific instruments 2014-05, Vol.85 (5), p.055007-055007
Hauptverfasser:	den Heijer, M, Fokkema, V, Saedi, A, Schakel, P, Rost, M J
Format:	Artikel
Sprache:	eng
Schlagworte:	High vacuum Piezoelectric motors Pushing Scientific apparatus & instruments
Online-Zugang:	Volltext
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