Scribe–cleave–passivate (SCP) slim edge technology for silicon sensors

We are pursuing scribe–cleave–passivate (SCP) technology of making “slim edge” sensors. Such sensors have only a minimal amount of inactive peripheral region, which benefits construction of large-area tracker and imaging systems. Key application steps of this method are surface scribing, cleaving, a...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2013-12, Vol.731, p.260-265
Hauptverfasser:	Fadeyev, V., Sadrozinski, H.F.-W., Ely, S., Wright, J.G., Christophersen, M., Phlips, B.F., Pellegrini, G., Grinstein, S., Dalla Betta, G.-F., Boscardin, M., Klingenberg, R., Wittig, T., Macchiolo, A., Weigell, P., Creanza, D., Bates, R., Blue, A., Eklund, L., Maneuski, D., Stewart, G., Casse, G., Gorelov, I., Hoeferkamp, M., Metcalfe, J., Seidel, S., Kramberger, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerators Active area Charge Cleaving Collection Construction Devices Passivation Radiation hardness Scribing Sensors Silicon Slim edge
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