Proton incorporation in yttria-stabilized zirconia during atomic layer deposition
This work elucidated the proton-incorporation mechanism in ALD YSZ1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO2 p...
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| Veröffentlicht in: | International journal of hydrogen energy 2014-02, Vol.39 (6), p.2621-2627 |
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| container_title | International journal of hydrogen energy |
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| creator | Bae, Kiho Son, Kyung Sik Kim, Jun Woo Park, Suk Won An, Jihwan Prinz, Fritz B. Shim, Joon Hyung |
| description | This work elucidated the proton-incorporation mechanism in ALD YSZ1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO2 phase. SIMS indicated that the Y3+ and 2H+ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)3 proportional to the 2H+ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO2 with relatively small amounts of Y2O3 provided additional vacancies for proton incorporation, resulting in steeper [2H+]/[Y3+] slopes.
•This work clarifies the relationship between Y3+ and H+ in ALD YSZ.•2H2O was used as an oxidant to trace proton incorporation during deposition.•SIMS confirmed that the concentrations of Y3+ and 2H+ were linearly correlated.•XPS showed the presence of Y(OH)3 in proportion to the 2H+ content in ALD YSZ. |
| doi_str_mv | 10.1016/j.ijhydene.2013.11.023 |
| format | Article |
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•This work clarifies the relationship between Y3+ and H+ in ALD YSZ.•2H2O was used as an oxidant to trace proton incorporation during deposition.•SIMS confirmed that the concentrations of Y3+ and 2H+ were linearly correlated.•XPS showed the presence of Y(OH)3 in proportion to the 2H+ content in ALD YSZ.</description><identifier>ISSN: 0360-3199</identifier><identifier>EISSN: 1879-3487</identifier><identifier>DOI: 10.1016/j.ijhydene.2013.11.023</identifier><identifier>CODEN: IJHEDX</identifier><language>eng</language><publisher>Kidlington: Elsevier Ltd</publisher><subject>Alternative fuels. Production and utilization ; Applied sciences ; Atomic layer deposition ; Energy ; Exact sciences and technology ; Fuels ; Hydrogen ; Hydrogen-based energy ; Oxides ; Protons ; Secondary ion mass spectrometry ; Vacancies ; X-ray photoelectron spectroscopy ; Yttria stabilized zirconia ; Yttrium oxide ; Zirconium dioxide</subject><ispartof>International journal of hydrogen energy, 2014-02, Vol.39 (6), p.2621-2627</ispartof><rights>2013 Hydrogen Energy Publications, LLC.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c375t-eef2085a6f6d1c80b72b09f0200bd4dd41c7b1a49d9bff41c7205a588e08cf1c3</citedby><cites>FETCH-LOGICAL-c375t-eef2085a6f6d1c80b72b09f0200bd4dd41c7b1a49d9bff41c7205a588e08cf1c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.ijhydene.2013.11.023$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,777,781,3537,27905,27906,45976</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=28363848$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Bae, Kiho</creatorcontrib><creatorcontrib>Son, Kyung Sik</creatorcontrib><creatorcontrib>Kim, Jun Woo</creatorcontrib><creatorcontrib>Park, Suk Won</creatorcontrib><creatorcontrib>An, Jihwan</creatorcontrib><creatorcontrib>Prinz, Fritz B.</creatorcontrib><creatorcontrib>Shim, Joon Hyung</creatorcontrib><title>Proton incorporation in yttria-stabilized zirconia during atomic layer deposition</title><title>International journal of hydrogen energy</title><description>This work elucidated the proton-incorporation mechanism in ALD YSZ1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO2 phase. SIMS indicated that the Y3+ and 2H+ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)3 proportional to the 2H+ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO2 with relatively small amounts of Y2O3 provided additional vacancies for proton incorporation, resulting in steeper [2H+]/[Y3+] slopes.
•This work clarifies the relationship between Y3+ and H+ in ALD YSZ.•2H2O was used as an oxidant to trace proton incorporation during deposition.•SIMS confirmed that the concentrations of Y3+ and 2H+ were linearly correlated.•XPS showed the presence of Y(OH)3 in proportion to the 2H+ content in ALD YSZ.</description><subject>Alternative fuels. Production and utilization</subject><subject>Applied sciences</subject><subject>Atomic layer deposition</subject><subject>Energy</subject><subject>Exact sciences and technology</subject><subject>Fuels</subject><subject>Hydrogen</subject><subject>Hydrogen-based energy</subject><subject>Oxides</subject><subject>Protons</subject><subject>Secondary ion mass spectrometry</subject><subject>Vacancies</subject><subject>X-ray photoelectron spectroscopy</subject><subject>Yttria stabilized zirconia</subject><subject>Yttrium oxide</subject><subject>Zirconium dioxide</subject><issn>0360-3199</issn><issn>1879-3487</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNqFkE1r3DAQhkVpods0f6H4EujFzozlD_mWENokEEgKzVnI0qidxWttJG1h8-u77qa55jS88H4wjxBfECoE7M7XFa9_7x3NVNWAskKsoJbvxApVP5SyUf17sQLZQSlxGD6KTymtAbCHZliJHw8x5DAXPNsQtyGazP9Usc85silTNiNP_EyueOZow8ymcLvI86_C5LBhW0xmT7FwtA2Jl_Bn8cGbKdHpyz0Rj9-__by6Ke_ur2-vLu9KK_s2l0S-BtWazncOrYKxr0cYPNQAo2uca9D2I5pmcMPo_aJqaE2rFIGyHq08EV-PvdsYnnaUst5wsjRNZqawSxpbiQBNr9TB2h2tNoaUInm9jbwxca8R9MJQr_V_hnphqBH1geEhePayYZI1k49mtpxe07WSnVTNMnBx9NHh4T9MUSfLNFtyHMlm7QK_NfUXlmWM_A</recordid><startdate>20140214</startdate><enddate>20140214</enddate><creator>Bae, Kiho</creator><creator>Son, Kyung Sik</creator><creator>Kim, Jun Woo</creator><creator>Park, Suk Won</creator><creator>An, Jihwan</creator><creator>Prinz, Fritz B.</creator><creator>Shim, Joon Hyung</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20140214</creationdate><title>Proton incorporation in yttria-stabilized zirconia during atomic layer deposition</title><author>Bae, Kiho ; Son, Kyung Sik ; Kim, Jun Woo ; Park, Suk Won ; An, Jihwan ; Prinz, Fritz B. ; Shim, Joon Hyung</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c375t-eef2085a6f6d1c80b72b09f0200bd4dd41c7b1a49d9bff41c7205a588e08cf1c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Alternative fuels. Production and utilization</topic><topic>Applied sciences</topic><topic>Atomic layer deposition</topic><topic>Energy</topic><topic>Exact sciences and technology</topic><topic>Fuels</topic><topic>Hydrogen</topic><topic>Hydrogen-based energy</topic><topic>Oxides</topic><topic>Protons</topic><topic>Secondary ion mass spectrometry</topic><topic>Vacancies</topic><topic>X-ray photoelectron spectroscopy</topic><topic>Yttria stabilized zirconia</topic><topic>Yttrium oxide</topic><topic>Zirconium dioxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bae, Kiho</creatorcontrib><creatorcontrib>Son, Kyung Sik</creatorcontrib><creatorcontrib>Kim, Jun Woo</creatorcontrib><creatorcontrib>Park, Suk Won</creatorcontrib><creatorcontrib>An, Jihwan</creatorcontrib><creatorcontrib>Prinz, Fritz B.</creatorcontrib><creatorcontrib>Shim, Joon Hyung</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>International journal of hydrogen energy</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bae, Kiho</au><au>Son, Kyung Sik</au><au>Kim, Jun Woo</au><au>Park, Suk Won</au><au>An, Jihwan</au><au>Prinz, Fritz B.</au><au>Shim, Joon Hyung</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Proton incorporation in yttria-stabilized zirconia during atomic layer deposition</atitle><jtitle>International journal of hydrogen energy</jtitle><date>2014-02-14</date><risdate>2014</risdate><volume>39</volume><issue>6</issue><spage>2621</spage><epage>2627</epage><pages>2621-2627</pages><issn>0360-3199</issn><eissn>1879-3487</eissn><coden>IJHEDX</coden><abstract>This work elucidated the proton-incorporation mechanism in ALD YSZ1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO2 phase. SIMS indicated that the Y3+ and 2H+ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)3 proportional to the 2H+ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO2 with relatively small amounts of Y2O3 provided additional vacancies for proton incorporation, resulting in steeper [2H+]/[Y3+] slopes.
•This work clarifies the relationship between Y3+ and H+ in ALD YSZ.•2H2O was used as an oxidant to trace proton incorporation during deposition.•SIMS confirmed that the concentrations of Y3+ and 2H+ were linearly correlated.•XPS showed the presence of Y(OH)3 in proportion to the 2H+ content in ALD YSZ.</abstract><cop>Kidlington</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.ijhydene.2013.11.023</doi><tpages>7</tpages></addata></record> |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Alternative fuels. Production and utilization Applied sciences Atomic layer deposition Energy Exact sciences and technology Fuels Hydrogen Hydrogen-based energy Oxides Protons Secondary ion mass spectrometry Vacancies X-ray photoelectron spectroscopy Yttria stabilized zirconia Yttrium oxide Zirconium dioxide |
| title | Proton incorporation in yttria-stabilized zirconia during atomic layer deposition |
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