About the sublimation of Si surfaces vicinal of {111}

The aim of this paper is to report experimental results on the sublimation of Si{111}, studied by reflection electron microscopy (REM) in a large range of temperature (1060°C < T < 1300°C). The most important result is that on vicinals of {111}, the velocity is a linear function of the distanc...

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Veröffentlicht in:	Surface science 1993-07, Vol.291 (1), p.L745-L749
Hauptverfasser:	Alfonso, C., Heyraud, J.C., Métois, J.J.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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