Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror

Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror

This letter presents the design, simulation, fabrication, and successful demonstration of a variable optical attenuator (VOA) based on a micromachined micromirror combined with an optical fiber collimator. The micromirror has a size of 500μm in diameter and a rotational resonance of 4.94kHz. The mic...

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Veröffentlicht in:Optik (Stuttgart) 2013-10, Vol.124 (20), p.4100-4103
Hauptverfasser: Liu, Yingming, Xu, Jing, Zhong, Shaolong, Zhai, Leiying, Wu, Yaming
Format: Artikel
Sprache:eng
Schlagworte:
Attenuation
Attenuators
Electric potential
Insulators
Microelectromechanical systems (MEMS)
Micromachining
Micromirror
Noise levels
Optical fibers
Variable optical attenuator (VOA)
Vertical comb drive
Voltage
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container_end_page 4103
container_issue 20
container_start_page 4100
container_title Optik (Stuttgart)
container_volume 124
creator Liu, Yingming
Xu, Jing
Zhong, Shaolong
Zhai, Leiying
Wu, Yaming
description This letter presents the design, simulation, fabrication, and successful demonstration of a variable optical attenuator (VOA) based on a micromachined micromirror combined with an optical fiber collimator. The micromirror has a size of 500μm in diameter and a rotational resonance of 4.94kHz. The micromirror was actuated by vertical comb drive which was fabricated by bulk micromachining process on a silicon on insulator (SOI) wafer. The VOA operates at a low driving voltage of 4.4V corresponding to the rotation angle of 0.3°. The turn-on and turn-off response time of the VOA are 1.6ms and 2.74ms, respectively. Finally, the optical attenuation was measured and an optical attenuation as large as 40dB was obtained.
doi_str_mv 10.1016/j.ijleo.2012.12.033
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subjects Attenuation
Attenuators
Electric potential
Insulators
Microelectromechanical systems (MEMS)
Micromachining
Micromirror
Noise levels
Optical fibers
Variable optical attenuator (VOA)
Vertical comb drive
Voltage
title Variable optical attenuator based on a vertical comb drive actuated MEMS micromirror
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