Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor

In this paper, we present the design and simulation of a microelectromechanical system (MEMS)-based fluidic angular velocity sensor that can simultaneously detect two components of angular velocity (two degrees of freedom). The sensor includes three layers, in which only the layer containing in-plan...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2013-01, Vol.189, p.61-66
Hauptverfasser:	Dinh, Thien Xuan, Ogami, Yoshifumi
Format:	Artikel
Sprache:	eng
Schlagworte:	Angular velocity Channels Design engineering Electric potential Fluidic gyroscope Fluidics Jet flows Microelectromechanical system Microelectromechanical systems Sensitivity Sensors Simulation
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