Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor
In this paper, we present the design and simulation of a microelectromechanical system (MEMS)-based fluidic angular velocity sensor that can simultaneously detect two components of angular velocity (two degrees of freedom). The sensor includes three layers, in which only the layer containing in-plan...
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| Veröffentlicht in: | Sensors and actuators. A. Physical. 2013-01, Vol.189, p.61-66 |
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| container_title | Sensors and actuators. A. Physical. |
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| creator | Dinh, Thien Xuan Ogami, Yoshifumi |
| description | In this paper, we present the design and simulation of a microelectromechanical system (MEMS)-based fluidic angular velocity sensor that can simultaneously detect two components of angular velocity (two degrees of freedom). The sensor includes three layers, in which only the layer containing in-plane hotwire anemometers requires a standard MEMS process with one mask. The other layers can be fabricated using either hot embossing or conventional machining. In the sensor, four jets comprising two perpendicular pairs of flows are generated by a piezoelectric-actuated diaphragm through a valveless network channel. We consider two designs to optimize the angular velocity sensor structure with an objective function relating the output voltage to the angular velocity. |
| doi_str_mv | 10.1016/j.sna.2012.10.001 |
| format | Article |
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We consider two designs to optimize the angular velocity sensor structure with an objective function relating the output voltage to the angular velocity.</description><subject>Angular velocity</subject><subject>Channels</subject><subject>Design engineering</subject><subject>Electric potential</subject><subject>Fluidic gyroscope</subject><subject>Fluidics</subject><subject>Jet flows</subject><subject>Microelectromechanical system</subject><subject>Microelectromechanical systems</subject><subject>Sensitivity</subject><subject>Sensors</subject><subject>Simulation</subject><issn>0924-4247</issn><issn>1873-3069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqFkE1PwzAMhiMEEmPwA7j1yKXDTrK0FSfEt7SJA3CO3CSdMnUtJO3E_j2ZxhlOlq3nteyHsUuEGQKq6_UsdjTjgDz1MwA8YhMsC5ELUNUxm0DFZS65LE7ZWYxrABCiKCZsee-iX3UZdTaLfjO2NPi-y_omWz4s3_KaorOZHanN6dvHrGlHb71J-CqhIdu6tjd-2GXRdbEP5-ykoTa6i986ZR-PD-93z_ni9enl7naRG16JIVelnQuq6rqCQqFsuJxLFIrXaKhpJImSwHJI50LZAK-MQJR1qYgsARKIKbs67P0M_dfo4qA3PhrXttS5fowa5yikkjKVf1Gh5sixqlRC8YCa0McYXKM_g99Q2GkEvbes1zpZ1nvL-1GynDI3h4xL7269Czoa7zrjrA_ODNr2_o_0DwLFg0o</recordid><startdate>20130115</startdate><enddate>20130115</enddate><creator>Dinh, Thien Xuan</creator><creator>Ogami, Yoshifumi</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>7SP</scope></search><sort><creationdate>20130115</creationdate><title>Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor</title><author>Dinh, Thien Xuan ; Ogami, Yoshifumi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c293t-68d53a9bb907614f24541362b1caff4a38a0d2042408f029c3114b86aada01a03</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Angular velocity</topic><topic>Channels</topic><topic>Design engineering</topic><topic>Electric potential</topic><topic>Fluidic gyroscope</topic><topic>Fluidics</topic><topic>Jet flows</topic><topic>Microelectromechanical system</topic><topic>Microelectromechanical systems</topic><topic>Sensitivity</topic><topic>Sensors</topic><topic>Simulation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dinh, Thien Xuan</creatorcontrib><creatorcontrib>Ogami, Yoshifumi</creatorcontrib><collection>CrossRef</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Electronics & Communications Abstracts</collection><jtitle>Sensors and actuators. 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| ispartof | Sensors and actuators. A. Physical., 2013-01, Vol.189, p.61-66 |
| issn | 0924-4247 1873-3069 |
| language | eng |
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| source | Access via ScienceDirect (Elsevier) |
| subjects | Angular velocity Channels Design engineering Electric potential Fluidic gyroscope Fluidics Jet flows Microelectromechanical system Microelectromechanical systems Sensitivity Sensors Simulation |
| title | Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor |
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