Piezoelectrically actuated diamond cantilevers for high-frequency applications

In this work, we present a proof-of-concept for the modulation of field emission currents from boron doped nano-diamond based micro-electro-mechanical cantilevers. This modulation was achieved by variations in anode–cathode spacing using mechanical oscillations of the field emitting tips by means of...

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Veröffentlicht in:	Diamond and related materials 2013-09, Vol.38, p.69-72
Hauptverfasser:	Heidrich, N., Zuerbig, V., Iankov, D., Pletschen, W., Sah, R.E., Raynor, B., Kirste, L., Nebel, C.E., Ambacher, O., Lebedev, V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum nitride (AlN) Applied sciences Cantilever beams Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Devices Diamonds Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Electrodes Electron and ion emission by liquids and solids impact phenomena Electronics Exact sciences and technology Field emission Field emission, ionization, evaporation, and desorption Fullerenes and related materials diamonds, graphite Materials science Mechanical property characterization Micro electromechanical systems (MEMS) Modulation Molecular electronics, nanoelectronics Nanocomposites Nanocrystalline diamond Nanomaterials Nanostructure Oscillations p-type doping Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Specific materials
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