Dispersed reference interferometry
Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion...
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| Veröffentlicht in: | CIRP annals 2013, Vol.62 (1), p.551-554 |
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| container_title | CIRP annals |
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| creator | Martin, Haydn Jiang, Xiangqian |
| description | Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus. |
| doi_str_mv | 10.1016/j.cirp.2013.03.104 |
| format | Article |
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A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus.</description><identifier>ISSN: 0007-8506</identifier><identifier>DOI: 10.1016/j.cirp.2013.03.104</identifier><language>eng</language><publisher>Elsevier Ltd</publisher><subject>Diffraction gratings ; Dimensional ; Dispersion ; Dispersions ; Film thickness ; Interferometers ; Interferometry ; Measuring instrument ; Surface ; Topography ; Tracking</subject><ispartof>CIRP annals, 2013, Vol.62 (1), p.551-554</ispartof><rights>2013 CIRP</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c366t-1c99d640cd7c0ba0db09245e47d3af3d2f665cf64b2ce2ff3b0952e42b0859743</citedby><cites>FETCH-LOGICAL-c366t-1c99d640cd7c0ba0db09245e47d3af3d2f665cf64b2ce2ff3b0952e42b0859743</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0007850613001054$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,4010,27900,27901,27902,65306</link.rule.ids></links><search><creatorcontrib>Martin, Haydn</creatorcontrib><creatorcontrib>Jiang, Xiangqian</creatorcontrib><title>Dispersed reference interferometry</title><title>CIRP annals</title><description>Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus.</description><subject>Diffraction gratings</subject><subject>Dimensional</subject><subject>Dispersion</subject><subject>Dispersions</subject><subject>Film thickness</subject><subject>Interferometers</subject><subject>Interferometry</subject><subject>Measuring instrument</subject><subject>Surface</subject><subject>Topography</subject><subject>Tracking</subject><issn>0007-8506</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqFkE1LxDAQhnNQcF39A54WT15aJ5_dgBdZXRUWvOg5tMkEUvpl0hX239tSz3oaZuZ9h3kfQm4o5BSouq9zG-KQM6A8Bz7NxBlZAUCRbSWoC3KZUg0gJRRsRW6fQhowJnSbiB4jdhY3oRsxTk3f4hhPV-Tcl03C69-6Jp_754_da3Z4f3nbPR4yy5UaM2q1dkqAdYWFqgRXgWZCoigcLz13zCslrVeiYhaZ93zaS4aCVbCVuhB8Te6Wu0Psv46YRtOGZLFpyg77YzJUUi640sD_lwqmNSilZylbpDb2KU0ZzRBDW8aToWBmXqY2My8z8zLAp9n8ysNiwinvd8Bokg0zGhci2tG4Pvxl_wEnJXSa</recordid><startdate>2013</startdate><enddate>2013</enddate><creator>Martin, Haydn</creator><creator>Jiang, Xiangqian</creator><general>Elsevier Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7TA</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>2013</creationdate><title>Dispersed reference interferometry</title><author>Martin, Haydn ; Jiang, Xiangqian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c366t-1c99d640cd7c0ba0db09245e47d3af3d2f665cf64b2ce2ff3b0952e42b0859743</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Diffraction gratings</topic><topic>Dimensional</topic><topic>Dispersion</topic><topic>Dispersions</topic><topic>Film thickness</topic><topic>Interferometers</topic><topic>Interferometry</topic><topic>Measuring instrument</topic><topic>Surface</topic><topic>Topography</topic><topic>Tracking</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Martin, Haydn</creatorcontrib><creatorcontrib>Jiang, Xiangqian</creatorcontrib><collection>CrossRef</collection><collection>Materials Business File</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>CIRP annals</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Martin, Haydn</au><au>Jiang, Xiangqian</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Dispersed reference interferometry</atitle><jtitle>CIRP annals</jtitle><date>2013</date><risdate>2013</risdate><volume>62</volume><issue>1</issue><spage>551</spage><epage>554</epage><pages>551-554</pages><issn>0007-8506</issn><abstract>Dispersed reference interferometry (DRI) is a potentially useful technique for applications such as absolute displacement, surface topography and film thickness measurement. A bulk optic implementation of a short coherence dispersed reference interferometer is described with the chromatic dispersion applied using two matched transmission gratings in one arm. Such an interferometer can provide absolute knowledge of position by tracking a symmetrical fringe pattern produced by a spectrometer. An operating principle is presented and validation provided through empirical data from optical apparatus. We present experimental results for the resolution, linearity and repeatability of the investigated interferometer apparatus.</abstract><pub>Elsevier Ltd</pub><doi>10.1016/j.cirp.2013.03.104</doi><tpages>4</tpages></addata></record> |
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| ispartof | CIRP annals, 2013, Vol.62 (1), p.551-554 |
| issn | 0007-8506 |
| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Diffraction gratings Dimensional Dispersion Dispersions Film thickness Interferometers Interferometry Measuring instrument Surface Topography Tracking |
| title | Dispersed reference interferometry |
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