A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head

We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchr...

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Veröffentlicht in:Optics Express 2014-02, Vol.22 (3), p.2770-2781
Hauptverfasser: Idir, Mourad, Kaznatcheev, Konstantine, Dovillaire, Guillaume, Legrand, Jerome, Rungsawang, Rakchanok
Format: Artikel
Sprache:eng
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MATERIALS SCIENCE
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Zusammenfassung:We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.22.002770