Microstructure and optical properties of Fe-doped ZnO thin films prepared by DC magnetron sputtering

ZnO and Fe-doped ZnO thin films were prepared by DC magnetron sputtering. The microstructure and optical properties of the two samples were compared and studied by atomic force microscopy (AFM), X-ray diffraction (XRD), UV–vis spectra and photoluminescence (PL) spectra. The results show that ZnO thi...

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Veröffentlicht in:	Journal of crystal growth 2013-05, Vol.371, p.126-129
Hauptverfasser:	Gao, Fei, Liu, Xiao Yan, Zheng, Li Yun, Li, Mei Xia, Bai, Yong Mei, Xie, Juan
Format:	Artikel
Sprache:	eng
Schlagworte:	A1. Fe-doped A1. PL A1. XRD A3. DC magnetron sputtering B1. ZnO thin films Condensed matter: electronic structure, electrical, magnetic, and optical properties Conduction band Cross-disciplinary physics: materials science rheology Crystal defects Deposition by sputtering Direct current Exact sciences and technology Iron Magnetron sputtering Materials science Methods of crystal growth physics of crystal growth Methods of deposition of films and coatings film growth and epitaxy Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Photoluminescence Physics Spectra Theory and models of crystal growth physics of crystal growth, crystal morphology and orientation Thin films Zinc oxide
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