Design and FEM analysis of a new micromachined electro-thermally actuated micromanipulator
This paper presents the designs for a new configuration of an electro-thermally actuated SU-8 polymeric micromanipulator for biological and MEMS components manipulations. Two models are proposed with the following dimensions of the arms: 400 and respectively 800 μm length, for a thickness of around...
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| Veröffentlicht in: | Analog integrated circuits and signal processing 2014-02, Vol.78 (2), p.313-321 |
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| creator | Voicu, Rodica Cristina Műller, Raluca |
| description | This paper presents the designs for a new configuration of an electro-thermally actuated SU-8 polymeric micromanipulator for biological and MEMS components manipulations. Two models are proposed with the following dimensions of the arms: 400 and respectively 800 μm length, for a thickness of around 20–25 μm. The electro-thermally driven micromanipulators have been studied using computer simulations, based on finite element method performed with CoventorWare software tool. Results from performed numerical coupled electro-thermo-mechanical and transient electro-thermal simulations have been used to analyze both static and dynamic behavior of the micromanipulator. The influence of the achieved temperature in the arms along with the in-plane tips deflections as a function of the applied voltage has been investigated. The numerical investigations show a good mechanical behavior of the micromanipulators (displacement of the arms up to 10 μm for the first model and 20 μm for the second one). Also, the handling force (between 0 and 36 μN) of the designed micromanipulators has been investigated. |
| doi_str_mv | 10.1007/s10470-013-0209-5 |
| format | Article |
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Two models are proposed with the following dimensions of the arms: 400 and respectively 800 μm length, for a thickness of around 20–25 μm. The electro-thermally driven micromanipulators have been studied using computer simulations, based on finite element method performed with CoventorWare software tool. Results from performed numerical coupled electro-thermo-mechanical and transient electro-thermal simulations have been used to analyze both static and dynamic behavior of the micromanipulator. The influence of the achieved temperature in the arms along with the in-plane tips deflections as a function of the applied voltage has been investigated. The numerical investigations show a good mechanical behavior of the micromanipulators (displacement of the arms up to 10 μm for the first model and 20 μm for the second one). 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Also, the handling force (between 0 and 36 μN) of the designed micromanipulators has been investigated.</description><subject>Circuits and Systems</subject><subject>Computer simulation</subject><subject>Deflection</subject><subject>Design engineering</subject><subject>Electric potential</subject><subject>Electrical Engineering</subject><subject>Engineering</subject><subject>Finite element method</subject><subject>Mathematical analysis</subject><subject>Mathematical models</subject><subject>Signal,Image and Speech Processing</subject><issn>0925-1030</issn><issn>1573-1979</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNp9kDFPwzAQhS0EEqXwA9g8shju4iRORlRaQCpigYXFctxLm8pJip0I9d9jlM5Mb7jvPZ0-xm4R7hFAPQSEVIEAlAISKEV2xmaYKSmwVOU5m0GZZAJBwiW7CmEPAIlKYca-nig0246bbsNXy7eYxh1DE3hfc8M7-uFtY33fGrtrOtpwcmQH34thR741zh25scNohng6gV1zGJ0Zen_NLmrjAt2ccs4-V8uPxYtYvz-_Lh7XwsoEB0EKyKRgVW5KsAgml4ryypLBIlUyU5YKKEpbAdBGIhAWuZJpVatKJRVaOWd30-7B998jhUG3TbDknOmoH4PGDOJknpdFRHFC46cheKr1wTet8UeNoP886smjjh71n0edxU4ydUJkuy15ve9HHzWFf0q_mdh2DQ</recordid><startdate>20140201</startdate><enddate>20140201</enddate><creator>Voicu, Rodica Cristina</creator><creator>Műller, Raluca</creator><general>Springer US</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SC</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>JQ2</scope><scope>L7M</scope><scope>L~C</scope><scope>L~D</scope></search><sort><creationdate>20140201</creationdate><title>Design and FEM analysis of a new micromachined electro-thermally actuated micromanipulator</title><author>Voicu, Rodica Cristina ; Műller, Raluca</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c321t-e70ea40c76a90c10a637e6bcea1847357ce8089cb00ed310e186734bf7b72b1c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Circuits and Systems</topic><topic>Computer simulation</topic><topic>Deflection</topic><topic>Design engineering</topic><topic>Electric potential</topic><topic>Electrical Engineering</topic><topic>Engineering</topic><topic>Finite element method</topic><topic>Mathematical analysis</topic><topic>Mathematical models</topic><topic>Signal,Image and Speech Processing</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Voicu, Rodica Cristina</creatorcontrib><creatorcontrib>Műller, Raluca</creatorcontrib><collection>CrossRef</collection><collection>Computer and Information Systems Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Computer and Information Systems Abstracts Academic</collection><collection>Computer and Information Systems Abstracts Professional</collection><jtitle>Analog integrated circuits and signal processing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Voicu, Rodica Cristina</au><au>Műller, Raluca</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Design and FEM analysis of a new micromachined electro-thermally actuated micromanipulator</atitle><jtitle>Analog integrated circuits and signal processing</jtitle><stitle>Analog Integr Circ Sig Process</stitle><date>2014-02-01</date><risdate>2014</risdate><volume>78</volume><issue>2</issue><spage>313</spage><epage>321</epage><pages>313-321</pages><issn>0925-1030</issn><eissn>1573-1979</eissn><abstract>This paper presents the designs for a new configuration of an electro-thermally actuated SU-8 polymeric micromanipulator for biological and MEMS components manipulations. Two models are proposed with the following dimensions of the arms: 400 and respectively 800 μm length, for a thickness of around 20–25 μm. The electro-thermally driven micromanipulators have been studied using computer simulations, based on finite element method performed with CoventorWare software tool. Results from performed numerical coupled electro-thermo-mechanical and transient electro-thermal simulations have been used to analyze both static and dynamic behavior of the micromanipulator. The influence of the achieved temperature in the arms along with the in-plane tips deflections as a function of the applied voltage has been investigated. The numerical investigations show a good mechanical behavior of the micromanipulators (displacement of the arms up to 10 μm for the first model and 20 μm for the second one). 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| subjects | Circuits and Systems Computer simulation Deflection Design engineering Electric potential Electrical Engineering Engineering Finite element method Mathematical analysis Mathematical models Signal,Image and Speech Processing |
| title | Design and FEM analysis of a new micromachined electro-thermally actuated micromanipulator |
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