Planar surface implanted diffractive grating couplers in SOI

Grating couplers are used to efficiently couple light from an optical fibre to a silicon waveguide as they allow light to be coupled into or out from any location on the device without the need for cleaving. However, using the typical surface relief grating fabrication method reduces surface planari...

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Veröffentlicht in:	Optics express 2014-01, Vol.22 (1), p.1077-1084
Hauptverfasser:	Topley, R, O'Faolain, L, Thomson, D J, Gardes, F Y, Mashanovich, G Z, Reed, G T
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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