Controlling Mold Releasing Propensity–The Role of Surface Energy and a Multiple Chain Transfer Agent

As the desired feature size of mold-assisted lithography decreases rapidly efficient demolding process becomes more challenging due to strong adhesion between polymeric resists and fine-featured molds. We synthesized new macromolecular additives and investigated the effects of surface energy and con...

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Veröffentlicht in:	ACS applied materials & interfaces 2012-07, Vol.4 (7), p.3465-3470
Hauptverfasser:	Kim, Bong-Gi, Jeong, Eun Jeong, Kwon, Ki Hwan, Yoo, Yeong-Eun, Choi, Doo-Sun, Kim, Jinsang
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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