Magnetic nanostructures for non-volatile memories
•Two methods were used to fabricate submicron nanomagnets.•Magnets prepared by lift-off had vertical sidewalls without fencing features.•The nanomagnet mask pattern was optimized for ion-milling etch.•Angular dependence of the ground state was calculated by micromagnetic simulation.•The state of the...
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Veröffentlicht in: | Microelectronic engineering 2013-10, Vol.110, p.474-478 |
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Format: | Artikel |
Sprache: | eng |
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