Analysis of ZnO nanorod growth from inclined columnar seed layer

•Lateral growth of nanorods requires a metal barrier for preventing vertical growth.•For unidirectional growth ZnO seed layer should have an inclined columnar structure.•The etched surface profile is influenced by crystallinity and inclined orientation.•Each side of etched surface has the different...

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Veröffentlicht in:	Microelectronic engineering 2013-10, Vol.110, p.446-449
Hauptverfasser:	Kim, Myoung-Soo, Lee, Da-Hyeok, Cha, Young-Hwan, O, Beom-Hoan, Lee, Seung-Gol, Park, Se-Geun
Format:	Artikel
Sprache:	eng
Schlagworte:	Barriers Chromium Columns (structural) Hydrothermal deposition Inclined c-axis ZnO seeds Lateral growth Nanocomposites Nanomaterials Nanostructure Seeds Zinc oxide ZnO nanorods
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