Modelling for the optimization of the reaction chamber in silicon nanoparticle synthesis by a radio-frequency induction thermal plasma

The optimization of the reaction chamber for the silicon nanoparticle synthesis process by a radio-frequency induction thermal plasma is addressed using a plasma thermo-fluid-dynamic model coupled with electromagnetic field equations and with a moment model for nanoparticle transport. Various reacti...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Plasma sources science & technology 2012-10, Vol.21 (5), p.55007-1-10
Hauptverfasser: Colombo, V, Ghedini, E, Gherardi, M, Sanibondi, P
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!