Nanotribological properties of silicon surfaces nanopatterned by laser interference lithography

The problems caused by the adhesive force and friction force become more critical when the size of M/NEMS devices shrinks to micro/nano-scale. The nanotexture-patterned surface is an effective approach to reduce friction force on micro/nano-scale. Laser interference lithography is an attractive meth...

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Veröffentlicht in:	Journal of Russian laser research 2013-05, Vol.34 (3), p.288-294
Hauptverfasser:	He, Haidong, Yang, Haifeng, Zhao, Enlan, Hao, Jingbin, Qian, Jiguo, Tang, Wei, Zhu, Hua
Format:	Artikel
Sprache:	eng
Schlagworte:	Friction Interference Lasers Lithography Microwaves Nanocomposites Nanomaterials Nanostructure Optical Devices Optics Photonics Physics Physics and Astronomy RF and Optical Engineering Silicon
Online-Zugang:	Volltext
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