Fabrication and characteristics of magnetic field sensors based on nano-polysilicon thin-film transistors

A magnetic field sensor based on nano-polysilicon thin films transistors （TFTs） with Hall probes is proposed. The magnetic field sensors are fabricated on （100） orientation high resistivity （p 〉 500 Ω.cm） silicon substrates by using CMOS technology, which adopt nano-polysilicon thin films with thick...

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