Do SE sub(II) Electrons Really Degrade SEM Image Quality?

Summary Generally, in scanning electron microscopy ( SEM ) imaging, it is desirable that a high-resolution image be composed mainly of those secondary electrons ( SE s) generated by the primary electron beam, denoted SE sub(I). However, in conventional SEM imaging, other, often unwanted, signal comp...

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Veröffentlicht in:	Scanning 2013-01, Vol.35 (1), p.1-6
Hauptverfasser:	Bernstein, Gary H, Carter, Andrew D, Joy, David C
Format:	Artikel
Sprache:	eng
Schlagworte:	Backscattering BSE Diaphragms Imaging Lenses Scanning Scanning electron microscopy
Online-Zugang:	Volltext
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