Plasma Process. Polym. 5/2013

Cover: A hydrolysis reaction representing a simple and eco-friendly method has been employed to remove the capping layer, which is a by-product after the CF sub(4) plasma etching of PMMA. After the hydrolysis reaction, the hydrophobicity and transparency of the PMMA surface are improved due to the l...

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Veröffentlicht in:	Plasma processes and polymers 2013-05, Vol.10 (5), p.401-401
Hauptverfasser:	Her, E. K., Ko, T.-J., Shin, B., Roh, H., Dai, W., Seong, W. K., Kim, H.-Y., Lee, K.-R., Oh, K. H., Moon, M.-W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Byproducts Capping Hydrolysis Hydrophobicity Moon Polymers Polymethyl methacrylates
Online-Zugang:	Volltext
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