Chemical and Physical Sputtering of Polyethylene Terephthalate (PET)
The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate (ER) and the surface composition of PET thin films have been analyzed by real time in situ Fourier transform infrared spectroscopy (FTIR). After the onset of...
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| Veröffentlicht in: | Plasma processes and polymers 2013-03, Vol.10 (3), p.225-234 |
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| creator | Große-Kreul, Simon Corbella, Carles von Keudell, Achim |
| description | The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate (ER) and the surface composition of PET thin films have been analyzed by real time in situ Fourier transform infrared spectroscopy (FTIR). After the onset of the exposure of PET to the ion beam, the ER decreases rapidly by one order of magnitude irrespective of the ion energy. This slowing down of the ER is caused by cross‐linking of the polymer surface. The steady state etch yields are generally orders of magnitude higher than predicted by computer calculations. The addition of oxygen to the particle flux is only changing the surface composition. At low ion energies, chemical sputtering dominates causing very high sputter yields. In addition, no threshold ion energy is observed.
The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate and the surface composition of PET thin films have been analyzed by Fourier transform infrared spectroscopy (FTIR). After the onset of the exposure of PET to the argon ion beam, the etch rate decreases rapidly by one order of magnitude irrespective of the ion energy. This slowing down is caused by cross‐linking of the polymer surface. |
| doi_str_mv | 10.1002/ppap.201200094 |
| format | Article |
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The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate and the surface composition of PET thin films have been analyzed by Fourier transform infrared spectroscopy (FTIR). After the onset of the exposure of PET to the argon ion beam, the etch rate decreases rapidly by one order of magnitude irrespective of the ion energy. This slowing down is caused by cross‐linking of the polymer surface.</description><identifier>ISSN: 1612-8850</identifier><identifier>EISSN: 1612-8869</identifier><identifier>DOI: 10.1002/ppap.201200094</identifier><language>eng</language><publisher>Weinheim: WILEY-VCH Verlag</publisher><subject>Applied sciences ; Argon ions ; Beams (radiation) ; Coating, metallization, dyeing ; Crosslinking ; Etching ; Exact sciences and technology ; Fourier transforms ; Infrared spectroscopy ; Ion beams ; Machinery and processing ; Plastics ; Polyethylene terephthalate ; Polyethylene terephthalates ; Polymer industry, paints, wood ; Spectrum analysis ; Studies ; Technology of polymers</subject><ispartof>Plasma processes and polymers, 2013-03, Vol.10 (3), p.225-234</ispartof><rights>Copyright © 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim</rights><rights>2014 INIST-CNRS</rights><rights>Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c4184-d7be9fcf7c72561422ee0c52e572f247d8faed5f0422603d97073c79f64177833</citedby><cites>FETCH-LOGICAL-c4184-d7be9fcf7c72561422ee0c52e572f247d8faed5f0422603d97073c79f64177833</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fppap.201200094$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fppap.201200094$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,776,780,1411,27901,27902,45550,45551</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27179550$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Große-Kreul, Simon</creatorcontrib><creatorcontrib>Corbella, Carles</creatorcontrib><creatorcontrib>von Keudell, Achim</creatorcontrib><title>Chemical and Physical Sputtering of Polyethylene Terephthalate (PET)</title><title>Plasma processes and polymers</title><addtitle>Plasma Processes Polym</addtitle><description>The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate (ER) and the surface composition of PET thin films have been analyzed by real time in situ Fourier transform infrared spectroscopy (FTIR). After the onset of the exposure of PET to the ion beam, the ER decreases rapidly by one order of magnitude irrespective of the ion energy. This slowing down of the ER is caused by cross‐linking of the polymer surface. The steady state etch yields are generally orders of magnitude higher than predicted by computer calculations. The addition of oxygen to the particle flux is only changing the surface composition. At low ion energies, chemical sputtering dominates causing very high sputter yields. In addition, no threshold ion energy is observed.
The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate and the surface composition of PET thin films have been analyzed by Fourier transform infrared spectroscopy (FTIR). After the onset of the exposure of PET to the argon ion beam, the etch rate decreases rapidly by one order of magnitude irrespective of the ion energy. This slowing down is caused by cross‐linking of the polymer surface.</description><subject>Applied sciences</subject><subject>Argon ions</subject><subject>Beams (radiation)</subject><subject>Coating, metallization, dyeing</subject><subject>Crosslinking</subject><subject>Etching</subject><subject>Exact sciences and technology</subject><subject>Fourier transforms</subject><subject>Infrared spectroscopy</subject><subject>Ion beams</subject><subject>Machinery and processing</subject><subject>Plastics</subject><subject>Polyethylene terephthalate</subject><subject>Polyethylene terephthalates</subject><subject>Polymer industry, paints, wood</subject><subject>Spectrum analysis</subject><subject>Studies</subject><subject>Technology of polymers</subject><issn>1612-8850</issn><issn>1612-8869</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqFkM1P3DAQxaOqSKXQa8-RKiQ4ZBl_xfER7fIlLTRSt-Vouc64Cc0mwc4K8t9jWLSquPQ0M_LvvfG8JPlKYEYA6OkwmGFGgVAAUPxDsk9yQrOiyNXHXS_gU_I5hHsABqKA_WQxr3HdWNOmpqvSsp7C6_Bj2Iwj-qb7k_YuLft2wrGeWuwwXaHHoR5r05oR0-PyfHVymOw50wb88lYPkp8X56v5Vbb8fnk9P1tmlpOCZ5X8jcpZJ62kIiecUkSwgqKQ1FEuq8IZrISD-JIDq5QEyaxULudEyoKxg-R46zv4_mGDYdTrJlhsW9NhvwmacKYkU0QUEf32Dr3vN76Lv9OEEcmVEAWP1GxLWd-H4NHpwTdr4ydNQL-Eql9C1btQo-DozdaEmJPzprNN2KmoJDI6Q-TUlntsWpz-46rL8qz8d0e21TZhxKed1vi_OpdMCn13e6mXv-hicXezjNc8Azj8lSc</recordid><startdate>201303</startdate><enddate>201303</enddate><creator>Große-Kreul, Simon</creator><creator>Corbella, Carles</creator><creator>von Keudell, Achim</creator><general>WILEY-VCH Verlag</general><general>WILEY‐VCH Verlag</general><general>Wiley-VCH</general><general>Wiley Subscription Services, Inc</general><scope>BSCLL</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>201303</creationdate><title>Chemical and Physical Sputtering of Polyethylene Terephthalate (PET)</title><author>Große-Kreul, Simon ; Corbella, Carles ; von Keudell, Achim</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c4184-d7be9fcf7c72561422ee0c52e572f247d8faed5f0422603d97073c79f64177833</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Applied sciences</topic><topic>Argon ions</topic><topic>Beams (radiation)</topic><topic>Coating, metallization, dyeing</topic><topic>Crosslinking</topic><topic>Etching</topic><topic>Exact sciences and technology</topic><topic>Fourier transforms</topic><topic>Infrared spectroscopy</topic><topic>Ion beams</topic><topic>Machinery and processing</topic><topic>Plastics</topic><topic>Polyethylene terephthalate</topic><topic>Polyethylene terephthalates</topic><topic>Polymer industry, paints, wood</topic><topic>Spectrum analysis</topic><topic>Studies</topic><topic>Technology of polymers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Große-Kreul, Simon</creatorcontrib><creatorcontrib>Corbella, Carles</creatorcontrib><creatorcontrib>von Keudell, Achim</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Plasma processes and polymers</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Große-Kreul, Simon</au><au>Corbella, Carles</au><au>von Keudell, Achim</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Chemical and Physical Sputtering of Polyethylene Terephthalate (PET)</atitle><jtitle>Plasma processes and polymers</jtitle><addtitle>Plasma Processes Polym</addtitle><date>2013-03</date><risdate>2013</risdate><volume>10</volume><issue>3</issue><spage>225</spage><epage>234</epage><pages>225-234</pages><issn>1612-8850</issn><eissn>1612-8869</eissn><abstract>The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate (ER) and the surface composition of PET thin films have been analyzed by real time in situ Fourier transform infrared spectroscopy (FTIR). After the onset of the exposure of PET to the ion beam, the ER decreases rapidly by one order of magnitude irrespective of the ion energy. This slowing down of the ER is caused by cross‐linking of the polymer surface. The steady state etch yields are generally orders of magnitude higher than predicted by computer calculations. The addition of oxygen to the particle flux is only changing the surface composition. At low ion energies, chemical sputtering dominates causing very high sputter yields. In addition, no threshold ion energy is observed.
The polymer polyethylene terephthalate (PET) has been exposed to quantified beams of argon ions and oxygen atoms and molecules. The etch rate and the surface composition of PET thin films have been analyzed by Fourier transform infrared spectroscopy (FTIR). After the onset of the exposure of PET to the argon ion beam, the etch rate decreases rapidly by one order of magnitude irrespective of the ion energy. This slowing down is caused by cross‐linking of the polymer surface.</abstract><cop>Weinheim</cop><pub>WILEY-VCH Verlag</pub><doi>10.1002/ppap.201200094</doi><tpages>10</tpages></addata></record> |
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| source | Wiley Online Library Journals Frontfile Complete |
| subjects | Applied sciences Argon ions Beams (radiation) Coating, metallization, dyeing Crosslinking Etching Exact sciences and technology Fourier transforms Infrared spectroscopy Ion beams Machinery and processing Plastics Polyethylene terephthalate Polyethylene terephthalates Polymer industry, paints, wood Spectrum analysis Studies Technology of polymers |
| title | Chemical and Physical Sputtering of Polyethylene Terephthalate (PET) |
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