Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam

To study the interactions between picosecond soft x-ray laser (SXRL) beams and material surfaces, gold (Au), copper (Cu), and silicon (Si) surfaces were irradiated with SXRL pulses having a wavelength of 13.9 nm and a duration of ∼7 ps. Following irradiation, the surfaces of the substrates were obse...

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Veröffentlicht in:Applied physics. A, Materials science & processing Materials science & processing, 2013-01, Vol.110 (1), p.179-188
Hauptverfasser: Ishino, Masahiko, Faenov, Anatoly Y., Tanaka, Momoko, Tamotsu, Satoshi, Hasegawa, Noboru, Nishikino, Masaharu, Pikuz, Tatiana A., Kaihori, Takeshi, Kawachi, Tetsuya
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container_end_page 188
container_issue 1
container_start_page 179
container_title Applied physics. A, Materials science & processing
container_volume 110
creator Ishino, Masahiko
Faenov, Anatoly Y.
Tanaka, Momoko
Tamotsu, Satoshi
Hasegawa, Noboru
Nishikino, Masaharu
Pikuz, Tatiana A.
Kaihori, Takeshi
Kawachi, Tetsuya
description To study the interactions between picosecond soft x-ray laser (SXRL) beams and material surfaces, gold (Au), copper (Cu), and silicon (Si) surfaces were irradiated with SXRL pulses having a wavelength of 13.9 nm and a duration of ∼7 ps. Following irradiation, the surfaces of the substrates were observed using a scanning electron microscope and an atomic force microscope. With single pulse irradiation, ripple-like structures were formed on the Au and Cu surfaces. These structures were different from previously investigated conical structures formed on an Al surface. In addition, it was confirmed that the development of modified structures, i.e., growth of hillocks on the Au and Cu surfaces, was observed after multiple SXRL pulse exposures. However, on the Si surface, deep holes that seemed to be melted structures induced by the accumulation of multiple pulses of irradiations were found. Therefore, it was concluded that SXRL beam irradiation of various material surfaces causes different types of surface modifications, and the changes in the surface behaviors are attributed to the differences in the elemental properties, such as the attenuation length of x-ray photons.
doi_str_mv 10.1007/s00339-012-7100-6
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subjects Atomic structure
Beams (radiation)
Characterization and Evaluation of Materials
Condensed Matter Physics
Copper
Gold
Irradiation
Machines
Manufacturing
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Scanning electron microscopy
Silicon
Surfaces and Interfaces
Thin Films
X-ray lasers
title Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam
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