Microstructure and performance of AZO thin films prepared by sol–gel processing
Al-doped zinc oxide (AZO) films were prepared by a wet-chemical coating technique, their microstructure and crystal growth were characterized as a function of the single layer thickness. When similar final thicknesses are attained by more multiple subsequent coating-firing cycles, film porosity is r...
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| Veröffentlicht in: | Journal of sol-gel science and technology 2013-04, Vol.66 (1), p.120-125 |
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| creator | Jahn, Rainer Löbmann, Peer |
| description | Al-doped zinc oxide (AZO) films were prepared by a wet-chemical coating technique, their microstructure and crystal growth were characterized as a function of the single layer thickness. When similar final thicknesses are attained by more multiple subsequent coating-firing cycles, film porosity is reduced from over 14 to 2 %. Simultaneously the AZO crystallite size is increased from approximately 23 to 60 nm, a preferential c-axis oriented growth is observed. Different substrates (soda-lime glass, soda-lime glass with a SiO
2
barrier coating, borosilicate glass and alkali-free display glass) were used and the resulting AZO films were compared. It is found that the substrate composition primarily affects grain growth and subsequently the electrical performance of the AZO films. |
| doi_str_mv | 10.1007/s10971-013-2974-0 |
| format | Article |
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2
barrier coating, borosilicate glass and alkali-free display glass) were used and the resulting AZO films were compared. It is found that the substrate composition primarily affects grain growth and subsequently the electrical performance of the AZO films.</description><identifier>ISSN: 0928-0707</identifier><identifier>EISSN: 1573-4846</identifier><identifier>DOI: 10.1007/s10971-013-2974-0</identifier><language>eng</language><publisher>Boston: Springer US</publisher><subject>Aluminum ; Azo ; Borosilicate glass ; Ceramics ; Chemistry ; Chemistry and Materials Science ; Coating ; Colloidal gels. Colloidal sols ; Colloidal state and disperse state ; Composites ; Crystal growth ; Crystallites ; Crystals ; Exact sciences and technology ; General and physical chemistry ; Glass ; Glass substrates ; Grain growth ; Inorganic Chemistry ; Materials Science ; Microstructure ; Nanotechnology ; Natural Materials ; Optical and Electronic Materials ; Organic chemistry ; Original Paper ; Porosity ; Silicon dioxide ; Soda-lime glass ; Sol-gel processes ; Thickness ; Thin films ; Zinc oxide</subject><ispartof>Journal of sol-gel science and technology, 2013-04, Vol.66 (1), p.120-125</ispartof><rights>Springer Science+Business Media New York 2013</rights><rights>2014 INIST-CNRS</rights><rights>Journal of Sol-Gel Science and Technology is a copyright of Springer, (2013). All Rights Reserved.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c379t-a80d9cd4349aefce03170cc82f0bd475293cbeab649223b6ea105d0d8d37af963</citedby><cites>FETCH-LOGICAL-c379t-a80d9cd4349aefce03170cc82f0bd475293cbeab649223b6ea105d0d8d37af963</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://link.springer.com/content/pdf/10.1007/s10971-013-2974-0$$EPDF$$P50$$Gspringer$$H</linktopdf><linktohtml>$$Uhttps://link.springer.com/10.1007/s10971-013-2974-0$$EHTML$$P50$$Gspringer$$H</linktohtml><link.rule.ids>314,776,780,27901,27902,41464,42533,51294</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27592236$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Jahn, Rainer</creatorcontrib><creatorcontrib>Löbmann, Peer</creatorcontrib><title>Microstructure and performance of AZO thin films prepared by sol–gel processing</title><title>Journal of sol-gel science and technology</title><addtitle>J Sol-Gel Sci Technol</addtitle><description>Al-doped zinc oxide (AZO) films were prepared by a wet-chemical coating technique, their microstructure and crystal growth were characterized as a function of the single layer thickness. When similar final thicknesses are attained by more multiple subsequent coating-firing cycles, film porosity is reduced from over 14 to 2 %. Simultaneously the AZO crystallite size is increased from approximately 23 to 60 nm, a preferential c-axis oriented growth is observed. Different substrates (soda-lime glass, soda-lime glass with a SiO
2
barrier coating, borosilicate glass and alkali-free display glass) were used and the resulting AZO films were compared. It is found that the substrate composition primarily affects grain growth and subsequently the electrical performance of the AZO films.</description><subject>Aluminum</subject><subject>Azo</subject><subject>Borosilicate glass</subject><subject>Ceramics</subject><subject>Chemistry</subject><subject>Chemistry and Materials Science</subject><subject>Coating</subject><subject>Colloidal gels. Colloidal sols</subject><subject>Colloidal state and disperse state</subject><subject>Composites</subject><subject>Crystal growth</subject><subject>Crystallites</subject><subject>Crystals</subject><subject>Exact sciences and technology</subject><subject>General and physical chemistry</subject><subject>Glass</subject><subject>Glass substrates</subject><subject>Grain growth</subject><subject>Inorganic Chemistry</subject><subject>Materials Science</subject><subject>Microstructure</subject><subject>Nanotechnology</subject><subject>Natural Materials</subject><subject>Optical and Electronic Materials</subject><subject>Organic chemistry</subject><subject>Original Paper</subject><subject>Porosity</subject><subject>Silicon dioxide</subject><subject>Soda-lime glass</subject><subject>Sol-gel processes</subject><subject>Thickness</subject><subject>Thin films</subject><subject>Zinc oxide</subject><issn>0928-0707</issn><issn>1573-4846</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNp1kMtKxDAUhoMoOI4-gLuACG6qJ5dOmqWINxgRQTduQpqejJVOOybtYna-g2_ok5gyoiC4Cpx85z8_HyGHDE4ZgDqLDLRiGTCRca1kBltkwnIlMlnI2TaZgOZFBgrULtmL8RUAcsnUhDzc1S50sQ-D64eA1LYVXWHwXVja1iHtPD1_vqf9S91SXzfLSFcBVzZgRcs1jV3z-f6xwCZNO4cx1u1in-x420Q8-H6n5Onq8vHiJpvfX99enM8zJ5TuM1tApV0lhdQWvUMQTIFzBfdQVlLlXAtXoi1nUnMuyhlaBnkFVVEJZb2eiSk52eSm028Dxt4s6-iwaWyL3RANk1wXiotCJ_ToD_raDaFN7Qznuc4lz6VIFNtQo5AY0JtVqJc2rA0DM0o2G8kmSTajZANp5_g72UZnGx-StDr-LHKVj-3HsnzDxfTVLjD8Nvg__AsXY4zN</recordid><startdate>20130401</startdate><enddate>20130401</enddate><creator>Jahn, Rainer</creator><creator>Löbmann, Peer</creator><general>Springer US</general><general>Springer</general><general>Springer Nature B.V</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>AFKRA</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope><scope>7SR</scope><scope>7U5</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20130401</creationdate><title>Microstructure and performance of AZO thin films prepared by sol–gel processing</title><author>Jahn, Rainer ; Löbmann, Peer</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c379t-a80d9cd4349aefce03170cc82f0bd475293cbeab649223b6ea105d0d8d37af963</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Aluminum</topic><topic>Azo</topic><topic>Borosilicate glass</topic><topic>Ceramics</topic><topic>Chemistry</topic><topic>Chemistry and Materials Science</topic><topic>Coating</topic><topic>Colloidal gels. Colloidal sols</topic><topic>Colloidal state and disperse state</topic><topic>Composites</topic><topic>Crystal growth</topic><topic>Crystallites</topic><topic>Crystals</topic><topic>Exact sciences and technology</topic><topic>General and physical chemistry</topic><topic>Glass</topic><topic>Glass substrates</topic><topic>Grain growth</topic><topic>Inorganic Chemistry</topic><topic>Materials Science</topic><topic>Microstructure</topic><topic>Nanotechnology</topic><topic>Natural Materials</topic><topic>Optical and Electronic Materials</topic><topic>Organic chemistry</topic><topic>Original Paper</topic><topic>Porosity</topic><topic>Silicon dioxide</topic><topic>Soda-lime glass</topic><topic>Sol-gel processes</topic><topic>Thickness</topic><topic>Thin films</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Jahn, Rainer</creatorcontrib><creatorcontrib>Löbmann, Peer</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>Materials Science & Engineering Collection</collection><collection>ProQuest Central UK/Ireland</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Materials Science Collection</collection><collection>ProQuest Central Korea</collection><collection>SciTech Premium Collection</collection><collection>Materials Science Database</collection><collection>ProQuest Engineering Collection</collection><collection>Engineering Database</collection><collection>Materials Science Collection</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Engineering Collection</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of sol-gel science and technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Jahn, Rainer</au><au>Löbmann, Peer</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Microstructure and performance of AZO thin films prepared by sol–gel processing</atitle><jtitle>Journal of sol-gel science and technology</jtitle><stitle>J Sol-Gel Sci Technol</stitle><date>2013-04-01</date><risdate>2013</risdate><volume>66</volume><issue>1</issue><spage>120</spage><epage>125</epage><pages>120-125</pages><issn>0928-0707</issn><eissn>1573-4846</eissn><abstract>Al-doped zinc oxide (AZO) films were prepared by a wet-chemical coating technique, their microstructure and crystal growth were characterized as a function of the single layer thickness. When similar final thicknesses are attained by more multiple subsequent coating-firing cycles, film porosity is reduced from over 14 to 2 %. Simultaneously the AZO crystallite size is increased from approximately 23 to 60 nm, a preferential c-axis oriented growth is observed. Different substrates (soda-lime glass, soda-lime glass with a SiO
2
barrier coating, borosilicate glass and alkali-free display glass) were used and the resulting AZO films were compared. It is found that the substrate composition primarily affects grain growth and subsequently the electrical performance of the AZO films.</abstract><cop>Boston</cop><pub>Springer US</pub><doi>10.1007/s10971-013-2974-0</doi><tpages>6</tpages></addata></record> |
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| subjects | Aluminum Azo Borosilicate glass Ceramics Chemistry Chemistry and Materials Science Coating Colloidal gels. Colloidal sols Colloidal state and disperse state Composites Crystal growth Crystallites Crystals Exact sciences and technology General and physical chemistry Glass Glass substrates Grain growth Inorganic Chemistry Materials Science Microstructure Nanotechnology Natural Materials Optical and Electronic Materials Organic chemistry Original Paper Porosity Silicon dioxide Soda-lime glass Sol-gel processes Thickness Thin films Zinc oxide |
| title | Microstructure and performance of AZO thin films prepared by sol–gel processing |
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