Multifunctional TEM-specimen holder equipped with a piezodriving probe and an electron irradiation port

Multifunctional TEM-specimen holder equipped with a piezodriving probe and an electron irradiation port

The charging effect due to electron irradiation in an electron microscope has been studied so far with incident electrons. Here we report on a new specimen holder to control the charging effect by using electrons emitted from an irradiation port in the holder while maintaining a constant intensity o...

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Veröffentlicht in:Microscopy 2013-08, Vol.62 (4), p.487-490
Hauptverfasser: Shindo, Daisuke, Suzuki, Satoshi, Sato, Kuniaki, Akase, Zentaro, Murakami, Yasukazu, Yamazaki, Kazuya, Ikeda, Yuuta, Fukuda, Tomohisa
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container_end_page 490
container_issue 4
container_start_page 487
container_title Microscopy
container_volume 62
creator Shindo, Daisuke
Suzuki, Satoshi
Sato, Kuniaki
Akase, Zentaro
Murakami, Yasukazu
Yamazaki, Kazuya
Ikeda, Yuuta
Fukuda, Tomohisa
description The charging effect due to electron irradiation in an electron microscope has been studied so far with incident electrons. Here we report on a new specimen holder to control the charging effect by using electrons emitted from an irradiation port in the holder while maintaining a constant intensity of the incident electron beam. Details of the charging effect, such as electric field variation, are expected to be investigated by electron holography. The new specimen holder was developed by modifying a double-probe piezodriving specimen holder to introduce an electron irradiation port in one of its two arms. As a result, the new modified specimen holder consists of a piezodriving probe and an electron irradiation port, both of which can be controlled in three dimensions, using piezoelectric elements and micrometers. We demonstrate that variations in the charging effect for epoxy resin and surface contamination can be observed by electron holography.
doi_str_mv 10.1093/jmicro/dft021
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title Multifunctional TEM-specimen holder equipped with a piezodriving probe and an electron irradiation port
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