Effects of atomic collisions on the stoichiometry of thin films prepared by pulsed laser deposition
We present an analytical model to quantitatively study the effect of collisions between the atoms of a plume and the molecules of a surrounding gas on the nonstoichiometry of lithium-containing oxide thin films deposited using pulsed laser deposition. A comparison of the experimental data and the mo...
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| Veröffentlicht in: | Physical review letters 2013-07, Vol.111 (3), p.036101-036101, Article 036101 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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