A review on slip models for gas microflows

Accurate modeling of gas microflow is crucial for the microfluidic devices in MEMS. Gas microflows through these devices are often in the slip and transition flow regimes, characterized by the Knudsen number of the order of 10 −2 ~10 0 . An increasing number of researchers now dedicate great attenti...

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Veröffentlicht in:	Microfluidics and nanofluidics 2012-12, Vol.13 (6), p.845-882
Hauptverfasser:	Zhang, Wen-Ming, Meng, Guang, Wei, Xueyong
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical Chemistry Applied fluid mechanics Applied sciences Biomedical Engineering and Bioengineering Boundary conditions Devices Electronics Engineering Engineering Fluid Dynamics Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Mathematical models Micro- and nanoelectromechanical devices (mems/nems) Microfluidics Nanostructure Nanotechnology and Microengineering Navier-Stokes equations Physics Rarefied gas dynamics Review Paper Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Slip Slip flows Transition flow
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