Development of micro-vibrating flow pumps using MEMS technologies

In the present paper, we propose a micro-vibrating flow pump (micro-VFP), which is a novel micropump. The micro-VFP is constructed using an actively vibrating valve that has a cantilever-like structure fixed on a wall of a microchannel and a slit orifice downstream. The slit orifice is designed to m...

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Veröffentlicht in:	Microfluidics and nanofluidics 2012-11, Vol.13 (5), p.703-713
Hauptverfasser:	Osman, Osman Omran, Shintaku, Hirofumi, Kawano, Satoyuki
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical Chemistry Applied fluid mechanics Applied sciences Biomedical Engineering and Bioengineering Design Design engineering Driving ability Electronics Engineering Engineering Fluid Dynamics Exact sciences and technology Flow characteristics Flow rate Flow rates Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Magnetic fields Maximum flow Micro- and nanoelectromechanical devices (mems/nems) Microchannels Nanostructure Nanotechnology and Microengineering Physics Pumping Pumps Research Paper Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Slits Valves
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