A new bonding technique for human skin humidity sensors

For human skin humidity sensors, absolute flat sensor surfaces are needed to bring the sensor into intimate contact with the skin surface. To fulfill this requirement, a new bonding technique is presented which allows to perform contact pads not towering above the active sensor surface. As a new app...

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Bibliographische Detailangaben
Veröffentlicht in:	Sensors and actuators. A, Physical Physical, 2001-08, Vol.92 (1), p.364-369
Hauptverfasser:	Hanreich, Gernot, Nicolics, Johann, Mündlein, Martin, Hauser, Hans, Chabicovsky, Rupert
Format:	Artikel
Sprache:	eng
Schlagworte:	Alumina Applied sciences Bonding Bonding technique Carbon dioxide lasers Ceramic materials Electronics Exact sciences and technology Gold Human skin humidity sensor Laser micromachining Laser soldering Lead Lithography, masks and pattern transfer Mechanical engineering. Machine design Metallizing Microelectronic fabrication (materials and surfaces technology) Nickel compounds Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Skin Substrates
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