Accurate post-fabrication trimming of ultra-compact resonators on silicon

One of the challenges of the high refractive index contrast of silicon photonics platform is the high sensitivity of the resonance wavelength of resonators to dimensional variations caused by fabrication process variations. In this work, we have experimentally demonstrated an accurate post-fabricati...

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Veröffentlicht in:	Optics express 2013-06, Vol.21 (12), p.14139-14145
Hauptverfasser:	Atabaki, Amir H, Eftekhar, Ali A, Askari, Murtaza, Adibi, Ali
Format:	Artikel
Sprache:	eng
Schlagworte:	Equipment Design Equipment Failure Analysis Miniaturization Refractometry - instrumentation Silicon - chemistry Surface Plasmon Resonance - instrumentation Transducers
Online-Zugang:	Volltext
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