Mushroom-free selective epitaxial growth of Si, SiGe and SiGe:B raised sources and drains

► Cyclic Selective Epitaxial Growth/Etch (CSEGE) processes. ► “Mushroom-free” Si raised sources and drains; conformal growth along spacers. ► SiGe:B CSEGE: fluctuations of B and Ge concentrations at etch step locations. ► Little or no poly-SiGe:B mushrooms on top of gates with CSEGE. ► CSEGE degrades the crystalline quality and 2D nature of SiGe:B films. We have evaluated various Cyclic Selective Epitaxial Growth/Etch (CSEGE) processes in order to grow “mushroom-free” Si and SiGe:B Raised Sources and Drains (RSDs) on each side of ultra-short gate length Extra-Thin Silicon-On-Insulator (ET-SOI) transistors. The 750°C, 20Torr Si CSEGE process we have developed (5 chlorinated growth steps with four HCl etch steps in-between) yielded excellent crystalline quality, typically 18nm thick Si RSDs. Growth was conformal along the Si3N4 sidewall spacers, without any poly-Si mushrooms on top of unprotected gates. We have then evaluated on blanket 300mm Si(001) wafers the feasibility of a 650°C, 20Torr SiGe:B CSEGE process (5 chlorinated growth steps with four HCl etch steps in-between, as for Si). As expected, the deposited thickness decreased as the total HCl etch time increased. This came hands in hands with unforeseen (i) decrease of the mean Ge concentration (from 30% down to 26%) and (ii) increase of the substitutional B concentration (from 2×1020cm−3 up to 3×1020cm−3). They were due to fluctuations of the Ge concentration and of the atomic B concentration [B] in such layers (drop of the Ge% and increase of [B] at etch step locations). Such blanket layers were a bit rougher than layers grown using a single epitaxy step, but nevertheless of excellent crystalline quality. Transposition of our CSEGE process on patterned ET-SOI wafers did not yield the expected results. HCl etch steps indeed helped in partly or totally removing the poly-SiGe:B mushrooms on top of the gates. This was however at the expense of the crystalline quality and 2D nature of the ∼45nm thick Si0.7Ge0.3:B recessed sources and drains selectively grown on each side of the imperfectly protected poly-Si gates. The only solution we have so far identified that yields a lesser amount of mushrooms while preserving the quality of the S/D is to increase the HCl flow during growth steps.