Uniform growth and repeatable fabrication of inch-sized wafers of a single-crystal diamond

We conducted a repetitive process for tiling freestanding substrates made from one identical seed crystal. After the mechanical polishing of both sides of the tiled substrates over the inch-sized area, the boundaries between the constituent substrates were barely recognized. By repeating the tiling...

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Veröffentlicht in:Diamond and related materials 2013-03, Vol.33, p.27-31
Hauptverfasser: Yamada, Hideaki, Chayahara, Akiyoshi, Mokuno, Yoshiaki, Tsubouchi, Nobuteru, Shikata, Shin-ichi
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Sprache:eng
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