On the nature of defects and mechanism of their formation in thin borophosphosilicate glass layers produced by vapor deposition upon fabrication of integrated circuits

The data on the defects formed in vapor-deposited thin borophosphosilicate glass layers upon their interaction with surrounding atmosphere are analyzed. The formation, growth, and evolution of defects in glasses are studied. The classification of defects is proposed, and the concentration ranges of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Glass physics and chemistry 2000-03, Vol.26 (2), p.93-103
1. Verfasser:	Vasil’ev, V. Yu
Format:	Artikel
Sprache:	eng
Schlagworte:	Atmospheres Classification Defects Evolution Glass Integrated circuits Thin films Vapor deposition
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!