Position-controlled hydrothermal growth of ZnO nanorods on arbitrary substrates with a patterned seed layer viaultraviolet-assisted nanoimprint lithography

A novel technique for the position-controlled growth of ZnO nanorods is established, by combining ultraviolet-assisted nanoimprint lithography (UV-NIL) and hydrothermal growth. Various ZnO nanorod arrays were obtained on silicon substrates, by UV-NIL of ZnO seed patterns with lines of 200 nm wide at...

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Veröffentlicht in:	CrystEngComm 2013-04, Vol.15 (17), p.3463-3469
Hauptverfasser:	Park, Hyeong-Ho, Zhang, Xin, Lee, Keun Woo, Kim, Ka Hee, Jung, Sang Hyun, Park, Deok Soo, Choi, Young Su, Shin, Hyun-Beom, Sung, Ho Kun, Park, Kyung Ho, Kang, Ho Kwan, Park, Hyung-Ho, Ko, Chul Ki
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays Lithography Nanocomposites Nanomaterials Nanorods Nanostructure Seeds Zinc oxide
Online-Zugang:	Volltext
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