Flow curve determination on dc-MS and HPPMS CrAIN coatings

In this paper, a new method for determining flow curves of thin coatings is tested on the basis of chromium aluminum nitride coatings deposited by direct current and high power pulsed magnetron sputtering physical vapour deposition with a wide range of chemical composition. The flow curves have been...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2013-02, Vol.46 (8), p.084006-1-7
Hauptverfasser:	Bobzin, K, Bagcivan, N, Theiss, S, Perne, J
Format:	Artikel
Sprache:	eng
Schlagworte:	Chromium Coatings Computer simulation Deposition Finite element method Indenters Mathematical analysis Mathematical models
Online-Zugang:	Volltext
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