Influence of noble gas ion polishing species on extreme ultraviolet mirrors

Low energy ion polishing is attractive in thin films because of the small interaction zone with the treated material. In this context, various noble gases (Ne, Ar, Kr, and Xe) have been applied for low energy ion polishing of interfaces in nanoscale optical Mo/Si multilayers in order to mitigate the...

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Veröffentlicht in:	Journal of applied physics 2012-12, Vol.112 (12)
Hauptverfasser:	van den Boogaard, A. J. R., Zoethout, E., Makhotkin, I. A., Louis, E., Bijkerk, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic properties Grazing incidence Low energy Multilayers Nanostructure Polishing Roughness Ultraviolet
Online-Zugang:	Volltext
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