Transparent conductivity of fluorine-doped anatase TiO2 epitaxial thin films

Transparent conductive anatase TiO2−xFx(F:TiO2) epitaxial thin films were fabricated by reactive pulsed laser deposition with a solid fluorine source. F-doping as high as 1.6 × 1021 cm−3 (TiO1.95F0.05) was achieved under optimal growth conditions, and the obtained anatase TiO1.95F0.05 film had a low...

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Veröffentlicht in:	Journal of applied physics 2012-05, Vol.111 (9)
Hauptverfasser:	Mohri, Satoru, Hirose, Yasushi, Nakao, Shoichiro, Yamada, Naoomi, Shimada, Toshihiro, Hasegawa, Tetsuya
Format:	Artikel
Sprache:	eng
Schlagworte:	Anatase Bonding Electrical resistivity Electronics Epitaxy Optimization Thin films Titanium dioxide
Online-Zugang:	Volltext
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