Transparent conductivity of fluorine-doped anatase TiO2 epitaxial thin films
Transparent conductive anatase TiO2−xFx(F:TiO2) epitaxial thin films were fabricated by reactive pulsed laser deposition with a solid fluorine source. F-doping as high as 1.6 × 1021 cm−3 (TiO1.95F0.05) was achieved under optimal growth conditions, and the obtained anatase TiO1.95F0.05 film had a low...
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| Veröffentlicht in: | Journal of applied physics 2012-05, Vol.111 (9) |
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| container_title | Journal of applied physics |
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| creator | Mohri, Satoru Hirose, Yasushi Nakao, Shoichiro Yamada, Naoomi Shimada, Toshihiro Hasegawa, Tetsuya |
| description | Transparent conductive anatase TiO2−xFx(F:TiO2) epitaxial thin films were fabricated by reactive pulsed laser deposition with a solid fluorine source. F-doping as high as 1.6 × 1021 cm−3 (TiO1.95F0.05) was achieved under optimal growth conditions, and the obtained anatase TiO1.95F0.05 film had a low resistivity of 1.6 × 10−3 Ωcm and a high internal transmittance of >95%. Furthermore, the refractive index of a TiO1.95F0.05 film was >0.2 less than that of undoped TiO2. By comparing the refractive indices of F:TiO2 and Nb:TiO2, we concluded that the decreased refractive index in F:TiO2 can be attributed to a reduced electronic polarizability due to increased bond ionicity as well as doped electrons. |
| doi_str_mv | 10.1063/1.4712061 |
| format | Article |
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F-doping as high as 1.6 × 1021 cm−3 (TiO1.95F0.05) was achieved under optimal growth conditions, and the obtained anatase TiO1.95F0.05 film had a low resistivity of 1.6 × 10−3 Ωcm and a high internal transmittance of >95%. Furthermore, the refractive index of a TiO1.95F0.05 film was >0.2 less than that of undoped TiO2. 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F-doping as high as 1.6 × 1021 cm−3 (TiO1.95F0.05) was achieved under optimal growth conditions, and the obtained anatase TiO1.95F0.05 film had a low resistivity of 1.6 × 10−3 Ωcm and a high internal transmittance of >95%. Furthermore, the refractive index of a TiO1.95F0.05 film was >0.2 less than that of undoped TiO2. By comparing the refractive indices of F:TiO2 and Nb:TiO2, we concluded that the decreased refractive index in F:TiO2 can be attributed to a reduced electronic polarizability due to increased bond ionicity as well as doped electrons.</description><subject>Anatase</subject><subject>Bonding</subject><subject>Electrical resistivity</subject><subject>Electronics</subject><subject>Epitaxy</subject><subject>Optimization</subject><subject>Thin films</subject><subject>Titanium dioxide</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNotkLtOwzAUQC0EEqUw8AceYUjxtRM7HlHFS4rUpczRrR_CKI2D7SD694Da6SxHZziE3AJbAZPiAVa1As4knJEFsFZXqmnYOVkwxqFqtdKX5CrnT8YAWqEXpNsmHPOEyY2Fmjja2ZTwHcqBRk_9MMcURlfZODlLccSC2dFt2HDqplDwJ-BAy0cYqQ_DPl-TC49DdjcnLsn789N2_Vp1m5e39WNXGd60pTIg5c4q52opkFu0SsjWNh53htUKjUPNW6UtIgo0XELtDTTMm7rVO9tosSR3x-6U4tfscun3IRs3DDi6OOceBBccWC3rP_X-qJoUc07O91MKe0yHHlj_f6yH_nRM_AL7AV6H</recordid><startdate>20120501</startdate><enddate>20120501</enddate><creator>Mohri, Satoru</creator><creator>Hirose, Yasushi</creator><creator>Nakao, Shoichiro</creator><creator>Yamada, Naoomi</creator><creator>Shimada, Toshihiro</creator><creator>Hasegawa, Tetsuya</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20120501</creationdate><title>Transparent conductivity of fluorine-doped anatase TiO2 epitaxial thin films</title><author>Mohri, Satoru ; Hirose, Yasushi ; Nakao, Shoichiro ; Yamada, Naoomi ; Shimada, Toshihiro ; Hasegawa, Tetsuya</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c258t-c166bd7ee463a2dad7368d5fabc047acea92879daaa3ac2614fc150fc489bd593</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Anatase</topic><topic>Bonding</topic><topic>Electrical resistivity</topic><topic>Electronics</topic><topic>Epitaxy</topic><topic>Optimization</topic><topic>Thin films</topic><topic>Titanium dioxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Mohri, Satoru</creatorcontrib><creatorcontrib>Hirose, Yasushi</creatorcontrib><creatorcontrib>Nakao, Shoichiro</creatorcontrib><creatorcontrib>Yamada, Naoomi</creatorcontrib><creatorcontrib>Shimada, Toshihiro</creatorcontrib><creatorcontrib>Hasegawa, Tetsuya</creatorcontrib><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Mohri, Satoru</au><au>Hirose, Yasushi</au><au>Nakao, Shoichiro</au><au>Yamada, Naoomi</au><au>Shimada, Toshihiro</au><au>Hasegawa, Tetsuya</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Transparent conductivity of fluorine-doped anatase TiO2 epitaxial thin films</atitle><jtitle>Journal of applied physics</jtitle><date>2012-05-01</date><risdate>2012</risdate><volume>111</volume><issue>9</issue><issn>0021-8979</issn><eissn>1089-7550</eissn><abstract>Transparent conductive anatase TiO2−xFx(F:TiO2) epitaxial thin films were fabricated by reactive pulsed laser deposition with a solid fluorine source. F-doping as high as 1.6 × 1021 cm−3 (TiO1.95F0.05) was achieved under optimal growth conditions, and the obtained anatase TiO1.95F0.05 film had a low resistivity of 1.6 × 10−3 Ωcm and a high internal transmittance of >95%. Furthermore, the refractive index of a TiO1.95F0.05 film was >0.2 less than that of undoped TiO2. By comparing the refractive indices of F:TiO2 and Nb:TiO2, we concluded that the decreased refractive index in F:TiO2 can be attributed to a reduced electronic polarizability due to increased bond ionicity as well as doped electrons.</abstract><doi>10.1063/1.4712061</doi></addata></record> |
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| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| subjects | Anatase Bonding Electrical resistivity Electronics Epitaxy Optimization Thin films Titanium dioxide |
| title | Transparent conductivity of fluorine-doped anatase TiO2 epitaxial thin films |
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